SLA5800 Elastomer Sealed Mass Flow Controllers & Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | .003 - 2500 slpm |
| Accuracy Range | Up to ±0.6% of S.P. (20-100% F… |
| Turndown Ratio | 1-50 slpm: 100:1, 50-2500 lpm:… |
| Repeatability | 0.20% S.P. |
| Max Pressure | 4500 psi |
| Operating Temperature | -14°C - 65°C |
SLAMF Elastomer Sealed Mass Flow Controllers & Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | .003 - 2500 slpm (9000 slpm fo… |
| Accuracy Range | Up to ±0.6% of S.P. (20-100% F… |
| Turndown Ratio | 1-50 slpm: 100:1, 50-2500 lpm:… |
| Repeatability | 0.20% S.P. |
| Max Pressure | 4500 psi |
| Operating Temperature | -14°C - 65°C |
| Ingress Protection | IP66 |
GP200 Metal Sealed Mass Flow Controllers
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Pressured-based (P-MFC) |
| Flow Range | 3 sccm - 50,000 sccm |
| Accuracy Range | Zero Leak Valve: <±1% S.P. (5-… |
| Turndown Ratio | Zero Leak Valve: 0.5 - 100% F.… |
| Repeatability | < ±0.15% S.P. |
| Max Pressure | 150 psi |
| Operating Temperature | 10°C - 60°C |
GF100 Metal Sealed Mass Flow Controllers & Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | Standard GF Series: 3 sccm - 5… |
| Accuracy Range | Standard GF Series: ±1% S.P. >… |
| Turndown Ratio | Standard GF Series: 2-100%, H… |
| Repeatability | 5 - 100% = ±0.15% S.P, .2 - 5%… |
| Max Pressure | 500 psi |
| Operating Temperature | 10°C - 50°C |
GF100 Metal Sealed Mass Flow Controllers & Meters with EtherCat
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | Standard GF Series: 3 sccm - 5… |
| Accuracy Range | Standard GF Series: ±1% S.P. >… |
| Turndown Ratio | Standard GF Series: < 3-100%, … |
| Repeatability | 5 - 100% = ±0.15% S.P, .2 - 5%… |
| Max Pressure | 500 psi |
| Operating Temperature | 10 - 50°C |
GF080 Metal Sealed Mass Flow Controllers & Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | 3 sccm - 55 slpm |
| Accuracy Range | ±1% S.P. 35-100%, ±0.35% F.S. … |
| Turndown Ratio | < 5% - 100% |
| Repeatability | < ±0.2% S.P. |
| Max Pressure | 150 psi |
| Operating Temperature | 5°C - 50°C |
GF040 Elastomer Sealed Mass Flow Controllers & Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | 3 sccm - 50 slpm |
| Accuracy Range | 1% of S.P. 35-100%, 0.35% of F… |
| Turndown Ratio | 2-100% |
| Repeatability | 0.20% S.P. |
| Max Pressure | 150 psi |
| Operating Temperature | 5°C - 50°C |
MT3809 Metal Tube Flow Meters
| Type of Media | Gas / Liquid |
|---|---|
| Flow Measuring Principle | Variable Area (VA) |
| Flow Range | Water: 440 gpm / 100,000 l/h, … |
| Accuracy Range | ±2% FS / Class 2.5 VDI / VD… |
| Repeatability | All options except ELF: 0.25%… |
| Operating Temperature | -198°C - 420°C |
| Ingress Protection | IP66, IP67, Nema 4x, IP65 |
MT3750 Metal Tube Flow Meters
| Type of Media | Liquid, Gas |
|---|---|
| Flow Measuring Principle | Variable Area (VA) |
| Flow Range | Water: 26 gph / 100 l/h, Air: … |
| Accuracy Range | ±5% FS* / Class 4 VDI / VDE… |
| Repeatability | Less than 1% FS |
| Max Pressure | 4000 psi |
| Operating Temperature | -50°C - 204°C* |
| Ingress Protection | IP65, IP66, IP67, Nema 4x |
Sho-Rate™ Glass Tube Flow Meters
| Type of Media | Gas / Liquid |
|---|---|
| Flow Measuring Principle | Variable Area (VA) |
| Flow Range | Air: Up to 140 scfh / 63 slpm,… |
| Accuracy Range | ± 3% - 10% FS |
| Repeatability | 0.25% FS |
| Max Pressure | 200 psi |
| Operating Temperature | 1°C - 121°C |
GT1600 Glass Tube Flow Meters
| Type of Media | Gas/Liquid |
|---|---|
| Flow Measuring Principle | Variable Area (VA) |
| Flow Range | Water: Up to 0.41 gpm / 4,900 … |
| Accuracy Range | Standard: ±10%, ±5%, ±2% Full … |
| Repeatability | ≤0.5% Full Scale |
| Operating Temperature | 1°C - 121°C |
Quantim® QMC Coriolis Mass Flow Meters & Controllers
| Type of Media | Gas/Liquid |
|---|---|
| Flow Measuring Principle | Coriolis |
| Flow Range | 10 - 27,000 gram/hr |
| Accuracy Range | Liquid: 0.2% of rate, Gas: 0.5… |
| Repeatability | ±0.05% or ±[0.5 x (zero stabil… |
| Max Pressure | 1500 psi |
| Operating Temperature | 0°C - 60°C |
| Ingress Protection | IP40, IP65, IP66 |
GF120xHT Metal Sealed High-Temperature Mass Flow Controllers & Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | 50 sccm - 5 slpm |
| Accuracy Range | ±1% S.P. >35-100%, ±0.35% FS 2… |
| Repeatability | 5-100% = ±0.15% of S.P., 2-5% … |
| Max Pressure | 500 psi |
| Operating Temperature | 45°C - 150°C |
5850EMH Metal Sealed High-Temperature Mass Flow Controllers
| Type of Media | Gas/Vapor |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | 0.003 - 100 slpm |
| Accuracy Range | 1% of FS |
| Repeatability | ±0.25% of rate |
| Max Pressure | 145 psi |
| Operating Temperature | 50°C - 105°C |
5800E Elastomer Sealed Mass Flow Controllers & Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | .003 - 1000 slpm |
| Accuracy Range | 1% of FS, 1.5% of FS > 20 slpm |
| Turndown Ratio | 50:1 |
| Repeatability | 0.25% of rate |
| Max Pressure | 1500 psi |
| Operating Temperature | 5°C - 65°C |
5850EM Metal Sealed Mass Flow Controllers
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | 3 sccm - 30,000 sccm |
| Accuracy Range | 1% F.S. incl. linearity, 1.5% … |
| Turndown Ratio | 2-3% - 100% |
| Repeatability | 0.25% of rate |
| Max Pressure | 1500 psi |
| Operating Temperature | 5°C - 65°C |
5700 Elastomer Sealed Mass Flow Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | 0 - 50 slpm |
| Accuracy Range | 5% of FS including linearity |
| Repeatability | 0.50% FS |
| Max Pressure | 150 psi |
| Operating Temperature | 5°C - 65°C |
