MODELS: 5850E / 5851E / 5860E / 5861E / 5853E / 5863E
5800E Elastomer Sealed Mass Flow Controllers & Meters
Long-term device stability keeps your production on-target
Every product line has a workhorse — our 5850E Series thermal flow meters fit the bill. Actively in use for decades in thousands of applications worldwide, they utilize a unique, extremely stable flow sensor to provide the reliable, accurate and repeatable measurement and control that today’s demanding industrial manufacturing processes require.
Features
- Long-term zero stability of <0.2% full scale per year
- Fast flow response to command changes with negligible overshoot/undershoot
- Wide range of flow ratings - from 3 sccm up to 1000 slpm
- High pressure rating - up to 1,500 psi
- Removable flow sensor
- Insensitive to mounting attitude
- Mechanically and electrically compatible with other mass flow controllers
- Electrically activated valve override
- Corrosion-resistant valve
Benefits
- Proven long-term stability and accuracy across broad process and application range
- Excellent return on investment due to reliable performance
- Removable flow sensor eliminates need for continuous monitoring and readjustment of gas pressures
- Easily installed and serviced due to analog only input/outputs
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | .003 - 1000 slpm |
| Accuracy Range | 1% of FS, 1.5% of FS > 20 slpm |
| Turndown Ratio | 50:1 |
| Repeatability | 0.25% of rate |
| Max Pressure | 1500 psi |
| Operating Temperature | 5°C - 65°C |
| Measure/Control | Measure & Control (Controller), Measure Only (Meter) |
| Max Flow | 1000 slpm |
| Max Operating Pressure | 103 bar |
| Max Temperature | 65 celsius |
| Seal Option | Elastomer |
| Connectivity | Analog (0–5 V) |
Filename
File Type
Documents by Language
Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.
Example: 5850E - C - 4 - B - F
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