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MFC Upgrades

Two Upgrade Options.
One Goal: Better Process Control.

Maximize your investment with our forward-thinking MFC upgrade options . These cost-effective solutions not only extend the life of your existing equipment but also provide improved process control and optimized yields, saving you money. 

Option 1: MFC Upgrade Program

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Breathe New Life into Your Flow Controllers.

In high-tech manufacturing environments, running a process with sub-optimal yields costs you money. Stable, accurate, reliable mass flow controllers (MFCs) ensure the consistency and quality of your products.

But as technology advances, you might find yourself at a crossroads: replace your entire flow control system at a significant cost, or risk increased downtime.

How It Works

Upgrading your MFCs with Brooks Instrument is a seamless process designed to minimize disruption and maximize value:

  • Find your device and determine which model you want to upgrade to.
Your Device Upgraded Device
5800-E & I, 5800-S, MF-S, SLA5800, SLAMF Series Revision A SLA5800, SLAMF Series Revision B
Standard
Biotech Performance Package
Biotech Premium Package
SLA5800, SLAMF Series Revision B
Standard		 SLA5800, SLAMF Series Revision B
Biotech Performance Package
Biotech Premium Package
Quantim® QMB Quantim® QMC
  • Get a quote by submitting the form on this page
  • A Brooks Instrument sales representative will contact you with next steps
  • Your existing MFCs are carefully refurbished, replacing key components such as the electronics, sensor, cover can, and valve coil in a 3-week process
  • Enjoy peace of mind with our 12-month warranty and ongoing support.

We Understand the Challenges You Face:

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Tight capital and personnel budgets that make full flow control system replacement a daunting prospect

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The desire to enhance process efficiency without disrupting your validated workflows

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The need for improved accuracy and advanced diagnostics to safeguard your production

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Regulatory and compliance requirements

Our upgrade program addresses these challenges head-on, offering a cost-effective solution that brings your existing MFCs into the digital age.

It also supports sustainability initiatives and reduces waste, making it good for the planet and bottom lines.

Option 2: Zero Leak-by Valve Upgrade

Addressing First Wafer Effect via 100x Reduction in Valve Shut-Off

In idle mode the volume between the mass flow controller (MFC) control valve and downstream pneumatic isolation valve can become pressurized with process gas due to normal small leakage past the MFC’s control valve when in the closed position.

During the first process setpoint, this volume of unmetered gas can impact the first wafer.

Controlling internal MFC dead-volume after the valve and improving the valve shut-off by >100X virtually eliminates any potential process impact.

Zero Leak-By Upgrades

How to Upgrade

1. Select Upgrade Now below, login to the Support Portal, and then Create an RMA

2. Select Repair/Upgrade Services

3. Select the upgrade for your Brooks Instrument MFC.

Request a FREE consultation or upgrade now