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Semiconductor

Brooks Instrument delivers precision flow, vacuum, and pressure measurement and control technologies that drive innovation across industries. From mass flow controllers and variable area flow meters to complete semiconductor process solutions, our instruments ensure accuracy, repeatability, and reliability wherever performance matters most.

Trusted and Proven Solutions for Semiconductor Manufacturing

GP200 Metal Sealed Mass Flow Controllers

GP200 Series is the first fully pressure-insensitive pressure-based mass flow controller (P-MFC) designed specifically for advanced Etch and Deposition processes in semiconductor manufacturing.

GF100 Metal Sealed Mass Flow Controllers & Meters with EtherCat

Engineered for next-generation semiconductor tools, the Brooks GF100 Series delivers ultra-stable, high-speed mass flow control with embedded diagnostics, rapid response, and unmatched long-term reliability, even in the most demanding process environments.

GF100 Metal Sealed Mass Flow Controllers & Meters

Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity; that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides.

Quantim® QMC Coriolis Mass Flow Meters & Controllers

Achieve the most accurate, stable, repeatable and reproducible measurement and control of very low flow rates of liquid or gas with the new series of Quantim® QMC Coriolis flow meters and controllers from Brooks Instrument.

PC100 Metal Sealed Pressure Controllers

The PC100 Series pressure controllers and meters combine a host of high-performance technology features to deliver a new level of pressure control accuracy and reliability to demanding semiconductor, vapor deposition and other ultra-precise manufacturing processes.

XacTorr® Heated Capacitance Manometers

Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.

VersaTorr BVT100 Vacuum Gauges

VersaTorr BVT100 Series vacuum gauges offer best-in-class performance and have established new standards by extending the useable measuring range for thermal conductivity vacuum gauges by 1-3 decades.

SolidSense II® Pressure Transducers

For measuring pressure in ultra-high purity and specialty gas applications across many industries, pressure transmitters and transducers must maintain stability and accuracy. That's why Brooks Instrument SolidSense II® high pressure transducers combine weld-free, corrosion-resistant materials along with a design that delivers outstanding zero stability and accuracy within 0.25% of full scale.