XacTorr® Heated Capacitance Manometers
Minimize drift and thermal effects. Maximize vacuum process results.
Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.
The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate. This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance.
The result: ultra-accurate, repeatable and efficient vacuum measurement that ensures each time you evacuate a chamber, it reaches the precise Torr your process requires for clean, contaminant-free production.
Features
- Available for process ranges from 0.10 Torr to 1000 Torr
- Multiple accuracy levels available
- Patented Mark IV sensor
- Digital architecture enables operation over a wide dynamic range with extremely good accuracy
- Dual-zone temperature control improves measurement stability and repeatability
- Multi-decade digital calibration provides superior window of known accuracy
- Intelli-touch zero adjustment
- Independent & easily accessible diagnostic service port
- DeviceNet® and analog communication options
Benefits
- Lower drift, superior protection from deposition of process gases
- Elimination of manual potentiometers and drift associated with electronics
- Fast warm-up, close temperature control, rapid response to changes
- Multi-decade calibration provides superior window of known accuracy, real-time compensation of ambient temperature effects
- Cannot be zeroed if pressure is too high or desired temperature not reached
- Diagnostic port allows monitoring and data acquisition simultaneously with device operation for chamber and tool matching along with “real time” advanced troubleshooting
| Pressure Range | 0.1, 1, 2, 10, 20, 100, 1000 Torr (mBar & Pascal References Available) |
|---|---|
| Accuracy | CMX0: 0.25% of Reading, CMX1, CMX2: 1 to 1000 Torr Ranges = 0.15% of Reading, CM1, CMX2: < 1 Torr Ranges = 0.25% of Reading |
| Connectivity | DeviceNet, RS485 |
| Device Temperature | CMX0 Ambient, CMX1 45°C, CMX2 100°C, CMX3 160°C |
| Measuring Principle | Capacitance Diaphragm Gauge |
Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.
Example: CMX - 0 - XXX - 2 - 2
| Capacitance Manometer | Temperature | Flow Range | Electrical Connector | Fitting |
| CMX | 0 - CMX0 (Ambient) 1 - CMX45 (45°C) 2 - CMX100 (100°C) |
XXX - Full Scale Range See data sheet for complete listing. |
2 - 15 Pin Male Sub D See data sheet for complete listing. |
2 - KF 16 Flange 3 - KF 25 Flange 4 - 8 VCR (1/2") Female 5 - Mini CF See data sheet for complete listing. |