Vacuum Gauges
High-Performance Vacuum Measurement
Brooks Instrument vacuum gauges deliver stable, repeatable measurement in demanding environments. Using advanced sensor technology, capacitance manometers and Pirani gauges provide fast response, long-term stability, and minimal drift across a wide vacuum range. Durable, low-maintenance designs support consistent performance in semiconductor, industrial, and life science applications.
CMC Unheated Capacitance Manometers
| Pressure Range | 10, 20, 50, 100 and 1000 Torr … |
|---|---|
| Accuracy | Type A = 0.25% of Reading, Typ… |
| Connectivity | Analog (0–10 V) |
| Device Temperature | Ambient |
XacTorr® Heated Capacitance Manometers
| Pressure Range | 0.1, 1, 2, 10, 20, 100, 1000 T… |
|---|---|
| Accuracy | CMX0: 0.25% of Reading, CMX1, … |
| Connectivity | DeviceNet, RS485 |
| Device Temperature | CMX0 Ambient, CMX1 45°C, CMX2 … |
VersaTorr BVT100 Vacuum Gauges
| Pressure Range | 8e-7 to 1000 Torr |
|---|---|
| Accuracy | 7.5x10-5 to 7.49x10-3 Torr: ±5… |
| Connectivity | Analog (0–10 V), RS232, RS485 |
| Device Temperature | Ambient - 50°C |
VersaTorr BVT200 Transducers
| Pressure Range | 8e-7 to 1000 Torr |
|---|---|
| Accuracy | 7.5x10-5 to 7.49x10-3 Torr: ±5… |
| Connectivity | Analog (0–10 V), RS232, RS485 |
| Device Temperature | Ambient - 50°C |
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