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MODELS: BVT200 / BVT225 / BVT275

VersaTorr BVT200 Transducers

Ultra-wide range pirani/capacitance/piezo transducer with atmospheric switch function.

Establish new standards with the VersaTorr BVT200/225 Series Pirani transducer. This is an all-in-one wide range measurement solution for a broad selection of vacuum applications. It differentiates from any other vacuum gauges by offering an overall cost-effective gas independent measurement from 5.0E-3 to 1333 mbar in combination with measurement down to 1E-6 mbar by use of the heat-loss principle.

In vacuum applications where the gas composition or type can change, traditional gas dependent Pirani gauges will result in measurement deviation from the actual pressure. The Tri- Sensor transducer uses a precision capacitance diaphragm gauge (CDG) sensor that eliminates the gas dependency and provides accurate measurements also when the gas properties change.

The integrated heat-loss MEMS Pirani sensor extends the measuring range down to 1E-6 mbar and provides a novel automatic zero adjustment of the capacitance manometer that eliminates the common needs for manual zero adjustment of traditional capacitance diaphragm gauges.

Features & Benefits
  • Ultra-wide measuring range of 9 decades
  • Capacitance diaphragm adds increased accuracy at 0.5% through low vacuum range
  • 6 decades of gas independent measurement from 5E-3 to 1333 mbar
  • Automatic zeroing of capacitance manometer
  • Vacuum temperature sensor for diagnostics
Applications
  • Load locks
  • Transfer chambers
  • Forelines
  • Vacuum roughing lines
  • Thin film processing
Pressure Range 8e-7 to 1000 Torr
Accuracy 7.5x10-5 to 7.49x10-3 Torr: ±5%, 7.5x10-3 to 7.49 Torr: ±0.5%, 7.50 to 7.49 Torr: ±0.5%, 75 Torr to 1000 Torr: ≤±0.5%
Connectivity Analog (0–10 V), RS232, RS485
Device Temperature Ambient - 50°C
Measuring Principle Piezo, Capacitance Diaphragm Gauge
Filename
File Type
Documents by Language
Data Sheet - BVT200 & BVT225 Series
PDF
Data Sheet - BVT275 Series
PDF
Installation Manual - BVT200 Series
PDF
Installation Manual - BVT225 Series
PDF

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact us.

Model Fitting Electrical Connection
BVT200 DN16KF 15pin D Sub