SLA5800 Elastomer Sealed Mass Flow Controllers & Meters
The SLA5800 Series features the high accuracy, high zero stability and high repeatability you expect from the industry leader in mass flow measurement and control technology. Engineered with a superior design - and manufactured with advanced metrology and test systems - the SLA5800 digital MFC offers a better zero drift specification than competitive products. SLA5800 has been proven to maximize production uptime and reduce maintenance and machine downtime costs.
GF040 Elastomer Sealed Mass Flow Controllers & Meters
Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.
GF100 Metal Sealed Mass Flow Controllers & Meters
Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.
Quantim® QMC Coriolis Mass Flow Meters & Controllers
This third-generation Quantim® QMC Coriolis flow meter is engineered to improve process quality, production yield and throughput and reduce scale-up time from lab to pilot plant to production. The devices use a modern IoT-equipped digital architecture that, combined with the next-generation sensor design, enables faster response time with little to no overshoot when adjusting gas or fluid flow, improved zero stability and expanded I/O options.
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XacTorr® Heated Capacitance Manometers
Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.
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VersaTorr BVT100 Vacuum Gauges
VersaTorr BVT100 Series vacuum gauges offer best-in-class performance and have established new standards by extending the useable measuring range for thermal conductivity vacuum gauges by 1-3 decades.
SolidSense II® Pressure Transducers
For measuring pressure in ultra-high purity and specialty gas applications across many industries, pressure transmitters and transducers must maintain stability and accuracy. That's why Brooks Instrument SolidSense II® high pressure transducers combine weld-free, corrosion-resistant materials along with a design that delivers outstanding zero stability and accuracy within 0.25% of full scale.
