GF040 Elastomer Sealed Mass Flow Controllers & Meters

One device. Multiple gases and flows. Maximum flexibility.

Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.

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Features

Programmable multi-gas/multi-range capabilities
Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
Sub-1 second flow response time and accuracy of 1% set point for demanding applications
Well suited for a variety of gases
Fast response, Hastelloy sensor
Easily accessible diagnostic service port is independent of tool communication
Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface

Applications

Solar cell chemical vapor deposition systems
Life sciences bioreactors
Vacuum processes
Nanotechnology/MEMS fabrication
Plasma, glass and web coating systems
Excellent option for manifold/gas delivery systems

Benefits

MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds
OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory
Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards
Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput
User-accessible service port simplifies troubleshooting and diagnostic tasks
Variety of elastomer seals provide cost performance flexibility across range of applications
Multi-protocol communication interface supports integration into existing systems

How to Write LabVIEW™ Programs for a Mass Flow Meter

Type of Media	Gas
Flow Measuring Principle	Thermal (TMF)
Flow Range	3 sccm - 50 slpm
Accuracy Range	1% of S.P. 35-100%, 0.35% of FS 2-35%
Turndown Ratio	2-100%
Repeatability	0.20% S.P.
Max Pressure	150 psi
Operating Temperature	5°C - 50°C
Measure/Control	Measure & Control (Controller), Measure Only (Meter)
Max Flow	50 slpm
Max Temperature	50 celsius
Seal Option	Elastomer
Accuracy (% of rate)	±1.0%
Connectivity	Analog (0–5 V), Analog (0–10 V), Analog (0–20 mA), DeviceNet, EtherCAT, Profibus, RS485, Analog (4–20 mA)

Filename

File Type

Documents by Language

Data Sheet - GF040 Series

PDF

English French German Spanish Japanese

Installation & Operation Manual - GF040 Series

PDF

English Japanese

DeviceNet™ Supplemental Manual - GF040 & GF080 Series

PDF

English

EtherCAT® Supplemental Manual - GF040 & GF080 Series

PDF

English

Profibus® Supplemental Manual - GF040 & GF080 Series

PDF

English

RS485 A-Protocol Supplemental Manual - GF040 & GF080 Series

PDF

English

RS485 L-Protocol Supplemental Manual - GF040 & GF080 Series

PDF

English

RS485 S-Protocol Supplemental Manual - GF040 & GF080 Series

PDF

English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: GF040 - N2 - S5

Meter Series	Fitting	Communications/Connector
GF040	XX - 9/16” - 18 UNF	P5 - Profibus / Analog (Input 0-5 V; Output 0-5 V); 9-Pin Female D conn. / 15-Pin Male D conn.
	T1 - 1/8” tube compression	P0 - Profibus / Analog (Input 0-20 mA; Output 0-20 mA); 9-Pin Female D conn. / 15-Pin Male D conn.
	T2 - 1/4” tube compression	P4 - Profibus / Analog (Input 4-20 mA; Output 4-20 mA); 9-Pin Female D conn. / 15-Pin Male D conn.
	T3 - 3/8” tube compression	E5 - EtherCAT™ / (Output 0-5 V); 2xRJ45 signal 2-Pin power
	T4 - 1/2” tube compression	D5 - DeviceNet / Analog (Output 0-5 V); 5-Pin mico signal and power / 3-Pin analog signal
	T6 - 6 mm tube compression	S5 - RS485: (S-Protocol)/Analog (Input 0-5 V; Output 0-5 V)15-Pin Male D (Brooks Protocol)
	T0 - 10 mm tube compression	S1 - RS485: (S-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Brooks Protocol)
	R2 - 1/4” RC (BSP)	S0 - RS485 (S-Protocol)/Analog (Input 0-20 mA ; Output 0-20 mA); 15-Pin Male D (Brooks Protocol)
	VX - 1/4” VCR	S4 - RS485 (S-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Brooks Protocol)
	O2 - 1/4” VCO	L5 - RS485 (L-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Celerity/Legacy Protocol)
	N2 - 1/4” NPT	L1 - RS485 (L-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Celerity/Legacy Protocol)