VersaTorr BVT100 Vacuum Gauges
Ultra-wide range vacuum measurement
VersaTorr BVT100 Series vacuum gauges offer best-in-class performance and have established new standards by extending the useable measuring range for thermal conductivity vacuum gauges by 1-3 decades.
Based on cutting edge MEMS (Microelectromechanical Systems) sensor technology, the design of VersaTorr BVT100 Series vacuum gauges is combined with a novel precision digital signal processing architecture and advanced innovative measurement algorithms. Together with precision automated manufacturing and calibration processes, these elements in combination provide a unique product capable of uncompromised measurement performance.
The well-known gas dependency in the rough vacuum range of thermal conductivity gauges has been eliminated by integrating a MEMS diaphragm sensor that offers precision performance comparable to more expensive capacitance manometers. This feature ensures more accurate control of vacuum system venting processes and can prevent over-pressurization of the vacuum system.
Features & Benefits
- Available in two models, BVT100 measures from atmosphere to 7.5 x 10-7 while BVT125 includes an atmospheric switch.
- These vacuum gauges simplify system design, save space and costs by minimizing the need for multiple vacuum gauges and a separate atmospheric switch.
- Ultra-wide measuring range of 9 decades
- Advanced digital signal processing provides unmatched price performance ratio
- Gas independent diaphragm sensor from 2 to 1333 mbar
- Easy configuration via Brooks Vacuum Transducer Communicator USB programmer
- Ultra-Stable Zero-point drift compensation
- Optional solid state setpoint relay for process control
Applications
- Load locks
- Transfer chambers
- Forelines
- Vacuum roughing lines
- Thin film processing
| Pressure Range | 8e-7 to 1000 Torr |
|---|---|
| Accuracy | 7.5x10-5 to 7.49x10-3 Torr: ±5%, 7.5x10-3 to 7.49 Torr: ±0.5%, 7.50 to 7.49 Torr: ±0.5%, 75 Torr to 1000 Torr: ≤±0.5% |
| Connectivity | Analog (0–10 V), RS232, RS485 |
| Device Temperature | Ambient - 50°C |
| Measuring Principle | Piezo |
Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact us.
| Model | Fitting | Electrical Connection |
| BVT100 | DN16KF | 15pin D Sub |