CMC Unheated Capacitance Manometers

Compact, proven unheated gauges for cost-effective vacuum measurement.

CMC Series capacitance manometers from Brooks Instrument deliver reliable, accurate vacuum measurement over a wide range of operating temperatures, providing an economical alternative to larger premium unheated gauges. Its compact design and proven performance make it an ideal upgrade for existing tools needing a small form-factor gauge.

Reliable and repeatable operation is assured in even the most aggressive processes through the all-welded design and Iconel® wetted surfaces. The combination of precision components and a wide temperature compensated operating range lets Brooks deliver best-in-class zero and span temperature coefficients for optimum measurement stability.

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Features

Available for process ranges from 10 Torr to 1000 Torr
Two accuracy levels available: 0.25% or 0.50% of reading (optional)
Exceptional performance over a wide range of operating temperatures
40% smaller than traditional unheated capacitance manometers
All-welded construction and Inconel® wetted surfaces

Applications

Semiconductor fabrication
Thin-film deposition processes – glass, web and optical coatings
Freeze drying perishable materials
High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)

Pressure Range	10, 20, 50, 100 and 1000 Torr Full Scale
Accuracy	Type A = 0.25% of Reading, Type B = 0.50% of Reading
Connectivity	Analog (0–10 V)
Device Temperature	Ambient
Measuring Principle	Capacitance Diaphragm Gauge