PC100 Metal Sealed Pressure Controllers
Accuracy under pressure. Precision under control.
The PC100 Series pressure controllers and meters combine a host of high-performance technology features to deliver a new level of pressure control accuracy and reliability to demanding semiconductor, vapor deposition and other ultra-precise manufacturing processes.
Built on the proven Brooks GF100 mass flow controller technology, the PC100 Series features a high-purity all-metal flow path, enhanced sensor technology engineered specifically to eliminate sensor drift and a user interface and device diagnostics capability that makes it much easier to conduct device evaluation and troubleshooting, resulting in limited service interruption and reduced downtime.
Features
- Response time: <1 second
- Full-scale flow rates up to 10 slm
- Transducer pressure range: 1000 Torr FS
- All-metal seal flow path: 5µ inch Ra surface finish
- PC125 with embedded flow meter includes a highly corrosion-resistant Hastelloy® C-22 flow sensor combined with high-speed ARM processor
- Fast-acting diaphragm-free valve assembly
- High-visibility LCD display with easily accessible push button for local indication of flow, temperature and network address
- Independent diagnostic/service port
- DeviceNet™ protocol
Applications
- Semiconductor advanced etch tools
- Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
- Physical vapor deposition (PVD) systems
Benefits
- High-performance components enable fast response and setting time for improved pressure control
- Reduced diverted gas consumption and associated abatement costs
- All metal, corrosion resistant SEMI F20 compliant wetted flow path with overall reduced surface area and un-swept volumes ensures faster dry-down during purge steps
- Long-term thermal or pressure sensor device stability maximizes yield and throughput
- User-programmable start-up function for processes requiring a slow-ramped pressure control
| Max Operating Pressure | 1000 torr |
|---|---|
| Repeatability | < ±0.2% F.S. |
| Accuracy | Pressure Reading: ± 1% of reading | Pressure Control: ± 0.2% of F.S. <10% F.S.; ± 1% of reading >10% to 100% F.S. | Flow Reading: ± 0.35% of F.S. 2-35% F.S. ; ± 1% of reading >35% F.S |
| Connectivity | RS485, DeviceNet |
| Operating Temperature | 10°C - 50°C |
| Pressure Control Range | 50:1 |
| Flow Range | 10 slpm (N2 or H2 only) |
| Max Flow | 10 slpm |
| Max Temperature | 50 celsius |
| Accuracy (FS) | ±1% FS |
| Seal Option | Metal |
| Measure/Control | Measure & Control (Controller) |
| Technology Principle | Pressure Control |
| Type of Media | Pressure |
Use the following guide, based on model code information from the data sheet, to translate the filename of the CAD drawings available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.
Example: GF120xHT (model) - CX (fitting) - G1 (connector)
| Model | Fitting | Connector |
| GF120xHT | BX - 1-1/2” body width, 92 mm W Seal | BX - Cable adapter to 15-pin D adapts G1 base |
| CX - 1-1/8” body width, 92 mm C Seal | *DX - DeviceNet™ 5-pin micro | |
| LX - 1-1/8” body width, 92 mm C Seal w/Poke Yoke | EX - Cable adapter to Card Edge (w/o VTP), RS485 through RJ11 jacks adapts GX base | |
| VX - 1-1/8” body width, 124 mm 1-1/4” VCR male | GX - 9-Pin D with RS485 (Unit”G”), display and overlay 180 degree orientation | |
| WX - 1-1/8” body width, 92 mm W Seal | G1 - 9-Pin D with RS485 (Unit”G”) | |
| HX - Adapter to cardedge adapts to G1 base | ||
| IX - Adapter to cardedge adapts to GX base | ||
| JX - Cable adapter with 9-pin STEC pin-out & jack screws (w/VTP) adapts SX base | ||
| KX - Cable adapter to MKS 15-pin D, adapts G1 base | ||
| QX - Adapter to cardedge (w/out VTP) adapts to SX base | ||
| SX - 9-pin D with STEC pin-out (w/VTP) (units “S“, “Q“) | ||
| UX - Cable adapter to 15-pin D (w/VTP) adapts SX base |