GF100 Metal Sealed Mass Flow Controllers & Meters with EtherCat
The Fastest and Most Accurate MFCs, Enhanced with the Speed of EtherCAT®
Performance perfected for Semiconductor Processes with embedded diagnostics, you can leverage real-time EtherCAT® data acquisition capabilities. The GF100 EtherCat series features ultra-stable flow sensor (≤ 0.15% of S.P. drift per year), enabling tighter low set point accuracy and reducing maintenance requirements. The GF100 series also features valve shutdown (≤ 0.15% of bin range) reduces valve leak-by to reduce first wafer effects and newly enhanced pressure transient insensitivity reduces crosstalk sensitivity for consistent mass flow delivery.
Features
- Long-term zero stability of <±0.15% full scale per year
- Settling times: 300 ms - <1 second
- Full-scale flow rates up to 300 slpm
- All-metal seal flow path: option for 5µ or 10µ inch Ra surface finish
- Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures
- MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
- Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
- GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes
- GF120xHT high-temperature mass flow controller can withstand operating environments of up to 150°C
Applications
- Semiconductor etch tools
- Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
- Physical vapor deposition (PVD) systems
- Epitaxial process systems
- Advanced strip processes
Benefits
- Exceptional performance
- Rapid reaction times improve application efficiency
- Flexible topology
- Virtually limitless network topology possible
- Simple and robust
- Configuration, diagnostics, and maintenance
- Affordability
- Standard Ethernet port
How a Mass Flow Meter Addresses Flow Bursts with Zero Leak-by Valve Technology
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | Standard GF Series: 3 sccm - 55 slpm, High Flow GF Series: 55 slpm - 300 slpm |
| Accuracy Range | Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20%, High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35% |
| Turndown Ratio | Standard GF Series: < 3-100%, High Flow GF Series: 5-100% |
| Repeatability | 5 - 100% = ±0.15% S.P, .2 - 5% = ±0.015% F.S. |
| Max Pressure | 500 psi |
| Operating Temperature | 10 - 50°C |
| Connectivity | EtherCAT |
| Max Flow | 300 slpm |
| Max Temperature | 50 celsius |
| Measure/Control | Measure & Control (Controller), Measure Only (Meter) |
| Seal Option | Metal |
| Accuracy (% of rate) | ±0.2% |
Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.
Example: GF125 -WX - E0 - STEP
| Model Series | Fitting | Connector |
| GF1xx | CX - 1-1/8” body width, 92 mm C Seal | E0 - EtherCAT® via twin RJ45, Power via 5-pin M8 connector |
| VX - 1-1/2” body width, 124mm 1/4” VCR male | ||
| WX - 1-1/8” body width, 92mm W Seal |