GF120xHT Metal Sealed High-Temperature Mass Flow Controllers & Meters
High-purity flow path. Outstanding performance and reliability for high-temperature applications.
GF120xHT high-temperature mass flow controllers (MFCs) and meters are designed to control and measure the mass flow rate of vapor from liquid or solid sources to support the growing usage of these precursors in semiconductor manufacturing processes. The flow module on GF120xHT can withstand operating environments of up to 150°C. To support this temperature range, the electronics are remotely connected to the rest of the device and mounted in a lower temperature location (max 50°C). The remote electronics can be DIN mounted with a choice of three different interconnecting cable lengths - 3 ft, 8 ft, and 16.5 ft standard. The wide range of communication protocols and fitting options make GF120xHT an ideal choice for next generation process equipment and upgrade for legacy heated MFCs.
Features
- Designed for high-temperature applications up to 150°C
- Convenient service port provides access to diagnostics via user-friendly interface
- Corrosion-resistant Hastelloy sensor
- Calibrated to the customer's process conditions
Applications
- Advanced Strip Processes
- Atomic Layer Deposition (ALD)
- Deposition
Benefits
- Ability to support applications up to 150°C for liquid precursor vapor delivery
- User-friendly diagnostics interface supports process engineer in ensuring MFC is operating within the specified limits for high-yield and maximum uptime
- Provides unmatched long-term sensor stability for maximum throughput and yields
- Calibrated at customer operating temperature and pressure for optimal performance
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | 50 sccm - 5 slpm |
| Accuracy Range | ±1% S.P. >35-100%, ±0.35% FS 2-35% |
| Repeatability | 5-100% = ±0.15% of S.P., 2-5% = ±0.015% of F.S. |
| Max Pressure | 500 psi |
| Operating Temperature | 45°C - 150°C |
| Seal Option | Metal |
| Measure/Control | Measure & Control (Controller) |
| Max Flow | 5 slpm |
| Max Temperature | 150 celsius |
| Accuracy (% of rate) | ±1.0% |
| Connectivity | Analog (0–5 V), DeviceNet, EtherCAT, RS485 |
Use the following guide, based on model code information from the data sheet, to translate the filename of the CAD drawings available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.
Example: GF120xHT (model) - CX (fitting) - G1 (connector)
| Model | Fitting | Connector |
| GF120xHT | BX - 1-1/2” body width, 92 mm W Seal | BX - Cable adapter to 15-pin D adapts G1 base |
| CX - 1-1/8” body width, 92 mm C Seal | *DX - DeviceNet™ 5-pin micro | |
| LX - 1-1/8” body width, 92 mm C Seal w/Poke Yoke | EX - Cable adapter to Card Edge (w/o VTP), RS485 through RJ11 jacks adapts GX base | |
| VX - 1-1/8” body width, 124 mm 1-1/4” VCR male | GX - 9-Pin D with RS485 (Unit”G”), display and overlay 180 degree orientation | |
| WX - 1-1/8” body width, 92 mm W Seal | G1 - 9-Pin D with RS485 (Unit”G”) | |
| HX - Adapter to cardedge adapts to G1 base | ||
| IX - Adapter to cardedge adapts to GX base | ||
| JX - Cable adapter with 9-pin STEC pin-out & jack screws (w/VTP) adapts SX base | ||
| KX - Cable adapter to MKS 15-pin D, adapts G1 base | ||
| QX - Adapter to cardedge (w/out VTP) adapts to SX base | ||
| SX - 9-pin D with STEC pin-out (w/VTP) (units “S“, “Q“) | ||
| UX - Cable adapter to 15-pin D (w/VTP) adapts SX base |