MODELS: 5850EM / 5851EM
5850EM Metal Sealed Mass Flow Controllers
Proven long-term stability. Ultra-pure performance for high pressure applications.
5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E & i Series MFCs. Its metal sealed construction and electro-polished wetted surfaces ensure outstanding flow integrity and help improve overall process efficiency by eliminating the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Features
- Long-term zero stability of <0.2% full scale per year
- <3 seconds settling time to command changes with negligible overshoot/undershoot
- Wide flow range – from 3 sccm up to 30,000 sccm
- High pressure rating - up to 1,500 psi
- Optional enhanced process internal finish - 5µ inch Ra avg
- Removable flow sensor
- Insensitive to mounting attitude
- Mechanically and electrically compatible with other mass flow controllers
- TTL compatible "valve off" and purge function
Applications
- Fiber Optic
- LED / MOCVD
- Semiconductor
- Solar
Benefits
- All-metal flow path enhances gas purity and reduces leaks
- Proven long-term stability and accuracy across broad process and application range
- Excellent return on investment due to reliable performance
- Removable flow sensor eliminates need for continuous monitoring and readjustment of gas pressures
- Easily installed and serviced with analog only input/outputs
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | 3 sccm - 30,000 sccm |
| Accuracy Range | 1% F.S. incl. linearity, 1.5% F.S. incl. linearity >20 slpm |
| Turndown Ratio | 2-3% - 100% |
| Repeatability | 0.25% of rate |
| Max Pressure | 1500 psi |
| Operating Temperature | 5°C - 65°C |
| Measure/Control | Measure & Control (Controller) |
| Max Flow | 30000 sccm |
| Max Operating Pressure | 103 bar |
| Max Temperature | 65 celsius |
| Seal Option | Metal |
| Accuracy (FS) | ±1% FS, ±1.5% FS |
| Connectivity | Analog (0–5 V) |
Example: MODEL - A - B - C - D - E
| Meter Series | Digital Communications I/O | Mechanical Connection (Body size 0 & 1 only) | Valve Type | Analog Communications I/O: | Revision Level |
| SLA5850 | EtherNet/IP | 1B - 1/4” tube compression | 1 - Normally closed | A - None | RevB |