SLA5800 Elastomer Sealed Mass Flow Controllers & Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | .003 - 2500 slpm |
| Accuracy Range | Up to ±0.6% of S.P. (20-100% F… |
| Turndown Ratio | 1-50 slpm: 100:1, 50-2500 lpm:… |
| Repeatability | 0.20% S.P. |
| Max Pressure | 4500 psi |
| Operating Temperature | -14°C - 65°C |
SLAMF Elastomer Sealed Mass Flow Controllers & Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | .003 - 2500 slpm (9000 slpm fo… |
| Accuracy Range | Up to ±0.6% of S.P. (20-100% F… |
| Turndown Ratio | 1-50 slpm: 100:1, 50-2500 lpm:… |
| Repeatability | 0.20% S.P. |
| Max Pressure | 4500 psi |
| Operating Temperature | -14°C - 65°C |
| Ingress Protection | IP66 |
GP200 Metal Sealed Mass Flow Controllers
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Pressured-based (P-MFC) |
| Flow Range | 3 sccm - 50,000 sccm |
| Accuracy Range | Zero Leak Valve: <±1% S.P. (5-… |
| Turndown Ratio | Zero Leak Valve: 0.5 - 100% F.… |
| Repeatability | < ±0.15% S.P. |
| Max Pressure | 150 psi |
| Operating Temperature | 10°C - 60°C |
GF100 Metal Sealed Mass Flow Controllers & Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | Standard GF Series: 3 sccm - 5… |
| Accuracy Range | Standard GF Series: ±1% S.P. >… |
| Turndown Ratio | Standard GF Series: 2-100%, H… |
| Repeatability | 5 - 100% = ±0.15% S.P, .2 - 5%… |
| Max Pressure | 500 psi |
| Operating Temperature | 10°C - 50°C |
GF100 Metal Sealed Mass Flow Controllers & Meters with EtherCat
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | Standard GF Series: 3 sccm - 5… |
| Accuracy Range | Standard GF Series: ±1% S.P. >… |
| Turndown Ratio | Standard GF Series: < 3-100%, … |
| Repeatability | 5 - 100% = ±0.15% S.P, .2 - 5%… |
| Max Pressure | 500 psi |
| Operating Temperature | 10 - 50°C |
GF080 Metal Sealed Mass Flow Controllers & Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | 3 sccm - 55 slpm |
| Accuracy Range | ±1% S.P. 35-100%, ±0.35% F.S. … |
| Turndown Ratio | < 5% - 100% |
| Repeatability | < ±0.2% S.P. |
| Max Pressure | 150 psi |
| Operating Temperature | 5°C - 50°C |
GF040 Elastomer Sealed Mass Flow Controllers & Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | 3 sccm - 50 slpm |
| Accuracy Range | 1% of S.P. 35-100%, 0.35% of F… |
| Turndown Ratio | 2-100% |
| Repeatability | 0.20% S.P. |
| Max Pressure | 150 psi |
| Operating Temperature | 5°C - 50°C |
Quantim® QMC Coriolis Mass Flow Meters & Controllers
| Type of Media | Gas/Liquid |
|---|---|
| Flow Measuring Principle | Coriolis |
| Flow Range | 10 - 27,000 gram/hr |
| Accuracy Range | Liquid: 0.2% of rate, Gas: 0.5… |
| Repeatability | ±0.05% or ±[0.5 x (zero stabil… |
| Max Pressure | 1500 psi |
| Operating Temperature | 0°C - 60°C |
| Ingress Protection | IP40, IP65, IP66 |
GF120xHT Metal Sealed High-Temperature Mass Flow Controllers & Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | 50 sccm - 5 slpm |
| Accuracy Range | ±1% S.P. >35-100%, ±0.35% FS 2… |
| Repeatability | 5-100% = ±0.15% of S.P., 2-5% … |
| Max Pressure | 500 psi |
| Operating Temperature | 45°C - 150°C |
5850EMH Metal Sealed High-Temperature Mass Flow Controllers
| Type of Media | Gas/Vapor |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | 0.003 - 100 slpm |
| Accuracy Range | 1% of FS |
| Repeatability | ±0.25% of rate |
| Max Pressure | 145 psi |
| Operating Temperature | 50°C - 105°C |
5800E Elastomer Sealed Mass Flow Controllers & Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | .003 - 1000 slpm |
| Accuracy Range | 1% of FS, 1.5% of FS > 20 slpm |
| Turndown Ratio | 50:1 |
| Repeatability | 0.25% of rate |
| Max Pressure | 1500 psi |
| Operating Temperature | 5°C - 65°C |
5850EM Metal Sealed Mass Flow Controllers
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | 3 sccm - 30,000 sccm |
| Accuracy Range | 1% F.S. incl. linearity, 1.5% … |
| Turndown Ratio | 2-3% - 100% |
| Repeatability | 0.25% of rate |
| Max Pressure | 1500 psi |
| Operating Temperature | 5°C - 65°C |
5700 Elastomer Sealed Mass Flow Meters
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | 0 - 50 slpm |
| Accuracy Range | 5% of FS including linearity |
| Repeatability | 0.50% FS |
| Max Pressure | 150 psi |
| Operating Temperature | 5°C - 65°C |