GF080 Metal Sealed Mass Flow Controllers & Meters
Raises the standard in performance for value-driven metal sealed applications.
For many industrial and semiconductor processes, both performance and cost efficiency are crucial. The GF80 Series metal sealed MFCs and meters deliver both: Engineered using the same fast response sensor and patented 4th generation MultiFlo™ technology as our best-selling GF100 series, it’s the right choice for operations that need high performance at a value price point. Moving to a metal sealed MFC brings the full benefit of MultiFlo™ multi-gas/multi-range capability since there are no limitations in gases that can be used, enhanced purity of the gas due to elimination of oxygen permeation through elastomers, and a reduction in maintenance since metal seals will last indefinitely.
Features
- Long-term zero stability of <±0.5% full scale per year
- <1 second settling times
- Full-scale flow rates up to 55 slpm
- All-metal seal flow path - 16µ inch Ra surface finish
- Corrosion-resistant Hastelloy® sensor can operate at lower temperatures for gases prone to thermal decomposition
- Programmable MultiFloTM capability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
- Best-in-class temperature coefficient specification through active temperature compensation
- Embedded self-test routines and independent diagnostic/service port
- Slimline body with VCR fittings
- DeviceNetTM, Profibus®, RS-485 and analog interfaces
Applications
- Cost efficient retrofit/upgrade of legacy MFCs in refurbished semiconductor process tools
- Reduce MFC inventory in six-inch/eight-inch semiconductor fabs
- MOCVD for LED and power device manufacturing
- Solar/thin film chemical vapor deposition (CVD) systems
- Analytical OEM equipment
Benefits
- Fast <1 second flow settling time eliminates wasted gas and process variability
- No elastomer seals that can have oxygen permeation, requiring replacement over time
- MultiFloTM simplifies and streamlines changing process gases — no more removing and calibrating MFCs
- New gases and/or ranges can be set in under 60 seconds
- Measurement accuracy not affected by temperature variations
- Convenient access to diagnostics port for maximum uptime
- Compact size eases integration into tight machine spaces; excellent choice for retrofits
- Multi-protocol communication interface simplifies integration into existing systems
How to Write LabVIEW™ Programs for a Mass Flow Meter
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | 3 sccm - 55 slpm |
| Accuracy Range | ±1% S.P. 35-100%, ±0.35% F.S. < 5-35% |
| Turndown Ratio | < 5% - 100% |
| Repeatability | < ±0.2% S.P. |
| Max Pressure | 150 psi |
| Operating Temperature | 5°C - 50°C |
| Measure/Control | Measure & Control (Controller), Measure Only (Meter) |
| Max Flow | 55 slpm |
| Max Temperature | 50 celsius |
| Seal Option | Metal |
| Accuracy (% of rate) | ±1.0% |
| Connectivity | Analog (0–5 V), Analog (0–10 V), Analog (0–20 mA), DeviceNet, Profibus, RS485, Analog (4–20 mA) |
Use the model code information from the data sheet to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.
0250 Series
Controls and powers up to 4 devices
0260 Series
Controls and monitors up to 30 devices, powers up to 10 devices.
Brooks Expert Support Tool (BEST)
The Brooks Expert Support Tool (BEST) provides expanded control of mass flow controllers and allows the user to take advantage of multiple servicing tasks.
MultiFlo™ Configurator
A comprehensive gas database enabling you to configure your MultiFlo™ capable MFC for thousands of gas types and ranges without removing it from the gas line.
Smart DDE
Dynamic Data Exchange software allows user to make bi-directional links between Windows® based applications and Brooks Instrument RS485 S-Protocol devices.