Capacitance Diaphragm Gauge
Brooks Instrument offers high-accuracy, stable measurement gauges featuring sensitive diaphragm and capacitance sensing technology. Designed for applications requiring precise, repeatable control, our capacitance diaphragm gauges deliver exceptional process repeatability.
From cleanroom environments to high-vacuum systems, Brooks Instrument capacitance diaphragm gauges provide consistent, traceable performance.
CMC Unheated Capacitance Manometers
| Pressure Range | 10, 20, 50, 100 and 1000 Torr … |
|---|---|
| Accuracy | Type A = 0.25% of Reading, Typ… |
| Connectivity | Analog (0–10 V) |
| Device Temperature | Ambient |
XacTorr® Heated Capacitance Manometers
| Pressure Range | 0.1, 1, 2, 10, 20, 100, 1000 T… |
|---|---|
| Accuracy | CMX0: 0.25% of Reading, CMX1, … |
| Connectivity | DeviceNet, RS485 |
| Device Temperature | CMX0 Ambient, CMX1 45°C, CMX2 … |
VersaTorr BVT200 Transducers
| Pressure Range | 8e-7 to 1000 Torr |
|---|---|
| Accuracy | 7.5x10-5 to 7.49x10-3 Torr: ±5… |
| Connectivity | Analog (0–10 V), RS232, RS485 |
| Device Temperature | Ambient - 50°C |