Every vacuum chamber process has a precise Torr level it must reach to sustain process yields. With industry-leading advanced sensor design features, capacitance manometers from Brooks Instrument are designed to improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects. And because they are fully digital devices, Brooks capacitance manometers operate over a wide dynamic range with extremely good accuracy. The result is an exceptionally reliable capacitance manometer family for all vacuum measurement applications.
- Semiconductor fabrication
- Thin-film deposition processes – glass, web and optical coatings
- Freeze drying perishable materials
- High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)
Select the capacitance manometer that best meets your project requirements.