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Pirani Transducers

Increase pressure measurement accuracy across low and medium vacuum spans.

Vacuum processes that incorporate a robotic handling require a load lock, transfer chamber, and vacuum lines that need to be monitored to ensure optimal process conditions. The VersaTorr Series Pirani Transducers are equipped with cutting end technology that uses the MEMS Pirani to measure most accurately in the low and medium vacuum ranges. A barometer can be included to get a true atmospheric differential. When combined with relays it will ensure the conditions of the environment are safe before operation.

KEY APPLICATIONS

  • Load locks
  • Transfer chambers
  • Forelines
  • Vacuum roughing lines
  • Thin film processing

PRODUCTS

BVT100 Series
BVT100 Series
BVT200 Series
BVT200 Series
Product Type Pirani Transducer Pirani Transducer
Differentiator

Dual Sensor: MEMS Pirani and Piezo Diaphragm

Tri- Sensor: MEMS Pirani, Capacitance Diaphragm, Piezo Diaphragm

Pressure Range

7.5x10-7 Torr through 1000 Torr

7.5x10-7 Torr through 1000 Torr

Accuracy

7.5x10-5 to7.49x10-3 Torr: ±5%

7.5x10-3 to7.49 Torr: ±5%

7.50 to 7.49 Torr: ±1%

75 Torr to 1000 Torr: ≤±0.5%

7.5x10-5 to7.49x10-3 Torr: ±5%

7.5x10-3 to7.49 Torr: ±0.5%

7.50 to 7.49 Torr: ±0.5%

75 Torr to 1000 Torr: ≤±0.5%

Temperature Ambient - 50 oC Ambient - 50 oC
Analogue Communication

0.5-9.5 Vdc (1V per decade)

0.5-9.5 Vdc (1V per decade)

Digital Communication

RS-232

RS-485

RS-232

RS-485