Search Results (34 total)

5850EMH Series High Temperature Mass Flow Controllers

5850EMH Series mass flow controllers from Brooks Instrument combine proven stability and metal-sealed purity for high-temperature processes.

Data Sheet
https://brooksinstrument.com/en/products/mass-flow-controllers/high-temperature-applications/5850emh-series
5850EM Series Metal Sealed Thermal Mass Flow Controllers

5850EM Series mass flow controllers from Brooks deliver long-term stability plus outstanding leak integrity and gas purity for high-pressure applications.

Data Sheet
https://brooksinstrument.com/en/products/mass-flow-controllers/metal-sealed/5850em-series
5850E Series Thermal Mass Flow Controllers & Meters

5850E Series elastomer sealed mass flow controllers and meters from Brooks deliver the long-term stability and accuracy demanded in manufacturing.

Data Sheet
https://brooksinstrument.com/en/products/mass-flow-controllers/thermal-elastomer-sealed/5850-e-i-series
SLA5800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

The SLA5800 elastomer sealed mass flow controllers deliver stable & precise thermal mass flow control. Embedded EtherNet/IP™ Protocol now available.

Data Sheet
https://brooksinstrument.com/en/products/mass-flow-controllers/thermal-elastomer-sealed/sla5800-series
Sho-Rate™ Series Glass Tube Variable Area Flow Meters

Sho-Rate glass tube VA flow meters from Brooks withstand high pressures and corrosive materials for industry-leading repeatability and reliability

Data Sheet - 1250/1255 Data Sheet - 1350G/1355G Data Sheet - 1358
https://brooksinstrument.com/en/products/variable-area-flow-meters/glass-tube/sho-rate-series
Metal Sealed Thermal & Pressure-based Gas Mass Flow Controllers & Meters

Metal sealed thermal & pressure-based mass flow controllers and meters are engineered for high-purity flow path and ultra-fast response times. Learn more.
https://brooksinstrument.com/en/products/mass-flow-controllers/metal-sealed
High Temperature Thermal Mass Flow Controllers & Meters

High temperature thermal mass flow controllers and meters from Brooks Instrument for critical precursor and dopant vapor delivery systems.
https://brooksinstrument.com/en/products/mass-flow-controllers/high-temperature-applications
Thermal Mass Flow Meters & Controllers

Trust Brooks’ elastomer sealed thermal mass flow meters for accuracy and reliability in your high-tech manufacturing, laboratory and other industrial processes.
https://brooksinstrument.com/en/products/mass-flow-controllers/thermal-elastomer-sealed

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