Product Type
Mass Flow Controller
Differentiator
Highest Flow Range
Proven, reliable technology
Flow Range (Full Scale Capacity)
100 slm (N2 equivalent)
Response Time
<3 sec to within 2% of SP (per SEMI E17-91)
Level of Purity / Surface Finish
—
Wetted Materials
316L, 316L VAR, & high alloy ferric SS
Valve Options
Normally Open
Normally Closed
Differential Pressure Range
50 - 350 kPa (7 - 50 psid)
Leak Integrity
1x10-10 atm cc/sec He (1x10-11 Pa m3 /sec)
Power Supply / Consumption