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Brooks Instrument Legacy Products

Mass Flow Controllers

Legacy - 5800S Series
5800S Series

Elastomer Sealed Thermal Mass Flow Controllers

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Legacy - Models 5835, 5836, 5837, 5838
Models 5835, 5836, 5837, 5838

Control Valves

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Legacy - Models 5816-EX, 5864-EX
Models 5816-EX, 5864-EX

Ex-Proof Mass Flow Controllers

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Legacy - 9861x
9861

High Temperature Mass Flow Controllers

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Legacy - SLA5800 Series Revision A
SLA5800 Series Revision A

Elastomer Sealed Thermal Mass Flow Controllers

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Download Data Sheet

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Legacy - MF Smart Series
MF Smart Series

Elastomer Sealed Thermal Mass Flow Controllers

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Legacy - GF135
GF135

Metal Sealed Thermal Mass Flow Controllers

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Legacy - 4800 Series
4800 Series

Elastomer Sealed Thermal Mass Flow Controllers

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Download Data Sheet

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Variable Area Flow Meters (Rotameters)

Legacy - 1198 Series
1198 Series

Sight Flow Indicator

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Legacy - 2001 Series
2001 Series

Acrylic Tube Variable Area Flow Meters

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Legacy - Full-View® 1100 Series
Full-View® 1100 Series

Glass Tube Variable Area Flow Meters

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Legacy - GT1000 Series
GT1000 Series

Glass Tube Variable Area Flow Meters

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Legacy - MT3600 Series
MT3600 Series

Metal Tube Variable Area Flow Meters

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Legacy - MT3809E Series
MT3809E Series

Metal Tube Variable Area Flow Meters

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Legacy - Sho-Rate Series 1350E
Sho-Rate Series 1350E/1355E

Glass Tube Variable Area Flow Meters

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Download Data Sheet

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Pressure & Vacuum Products

Legacy - Model 5866M
Model 5866M

Metal Sealed Pressure Controllers

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Legacy - Models 8606, 8607
Models 8606, 8607

Mechanical Pressure Regulators

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Legacy - GCS400 Series
GCS400 Series

Cylinder Scales

Legacy - Models C122, S122
Models C122, S122

Pressure Gauges

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Legacy - Models SFP32, SFP33
Models SFP32, SFP33

Seal-Free Pressure Transmitters

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Vaporization Products

Legacy - Direct Liquid Injection (DLI) Vaporizers
Direct Liquid Injection (DLI) Vaporizers

Liquid Vaporizer Systems

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Secondary Electronics & Software

Legacy - Models 0151E, 0151i
Models 0151E, 0151i

Flow Computers

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Legacy - Model VR100
Model VR100

Power Supply and Display

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