Skip links

News

Brooks Instrument Announces New Engineering Scholarship

November 13, 2018
Award recognizes students interested in engineering, flow or instrumentation

ISPE Boston 2018: Brooks Instrument to Present Newly Enhanced Mass Flow Controller Designed for Biotech Applications

August 29, 2018
Booth highlights to include newly enhanced SLA5800 Series Biotech MFC designed to help reduce bioprocessing complexity and costs.

APC|M 2018: Brooks Instrument Technology Expert to Speak About New Mass Flow Controller With Self-Diagnostics

April 09, 2018
Brooks Chief Technology Officer to deliver a technical presentation on the newly enhanced GF125 mass flow controller with high-speed EtherCAT® connectivity and embedded self-diagnostics monitoring.

Brooks Instrument Adds FOUNDATION™ Fieldbus Transmitter to Its MT3809 Series Variable Area Flow Meters

March 14, 2018
New transmitter for digital communications protocol makes it easier to integrate the popular MT3809 flow meter with automation control systems across the plant enterprise.

CSTIC and SEMICON CHINA 2018: Brooks Instrument to Present New Mass Flow Controller With Self-Diagnostics

February 08, 2018
Technology experts to deliver presentation and exhibit newly enhanced GF125 mass flow controller with high-speed EtherCAT® connectivity and embedded self-diagnostics

Brooks Instrument Receives Supplier Excellence Award from NAURA Technology Group, Ltd.

November 13, 2017
Semiconductor wafer processing toolmaker recognizes Brooks Instrument for high quality and repeatability in its digital mass flow controller products

SEMICON Europa 2017: New Vaporization Product Enhanced with EtherCAT

November 09, 2017
Leader in Semiconductor Mass Flow to exhibit the industry’s most accurate and reproducible deionized water vapor delivery module, along with its GF100 Series Mass Flow Controller with EtherCAT® to improve semiconductor process yields

SEMICON Taiwan 2017: New Deionized Water Vapor Delivery Module from Brooks Instrument

September 06, 2017
Company to exhibit the industry’s most accurate and reproducible deionized water vapor delivery module, along with its GF100 Series Mass Flow Controller with EtherCAT® to improve semiconductor process yields

New Brooks Instrument QuickShip Program Provides Immediate Fulfilment for Variable Area Flow Meters

September 05, 2017
Company will provide immediate shipment for its most popular Sho-Rate™ 1250/1255, 2500 series and 3000 series of variable area (VA) flow meters

SEMICON West 2017: New Deionized Water Vapor Delivery Module from Brooks Instrument

June 28, 2017
Company to exhibit the industry’s most accurate and reproducible deionized water vapor delivery module, along with its GF100 Series Mass Flow Controller with EtherCAT® to improve semiconductor process yields.

Brooks Instrument Names Mohamed Saleem as New Chief Technology Officer

February 14, 2017
Experienced material science, chemical engineering and semiconductor industry veteran to help guide strategic focus and advanced technology development.

Brooks Instrument Teams with Manna on Main Street to Help Serve Meals

December 15, 2016
A team from the Brooks Instrument global headquarters helps serve a meal at Manna on Main Street in Lansdale, PA.

A New Class of MFCs with Embedded Flow Diagnostics

October 14, 2016
Recent trends in multi-sensor measurements within a mass flow controller are reviewed, with a focus on controller self-diagnostics.

Brooks Instrument Experts Discuss Mass Flow Technology at the Institute for Electronics and Nanotechnology at Georgia Tech’s Industry Seminar Series

October 10, 2016
IEN Industry seminar provides insight on mass flow measurement and control issues for high-purity manufacturing applications.

SEMICON West 2016: New High-Speed EtherCAT® Mass Flow Controllers from Brooks Instrument

July 11, 2016
Powerfully enhanced GF100 Series MFCs will help improve semiconductor process performance, productivity and yields.