Skip links


SEMICON West 2017: New Deionized Water Vapor Delivery Module from Brooks Instrument

June 28, 2017
Company to exhibit the industry’s most accurate and reproducible deionized water vapor delivery module, along with its GF100 Series Mass Flow Controller with EtherCAT® to improve semiconductor process yields.

Brooks Instrument Names Mohamed Saleem as New Chief Technology Officer

February 14, 2017
Experienced material science, chemical engineering and semiconductor industry veteran to help guide strategic focus and advanced technology development.

Brooks Instrument Teams with Manna on Main Street to Help Serve Meals

December 15, 2016
A team from the Brooks Instrument global headquarters helps serve a meal at Manna on Main Street in Lansdale, PA.

A New Class of MFCs with Embedded Flow Diagnostics

October 14, 2016
Recent trends in multi-sensor measurements within a mass flow controller are reviewed, with a focus on controller self-diagnostics.

Brooks Instrument Experts Discuss Mass Flow Technology at the Institute for Electronics and Nanotechnology at Georgia Tech’s Industry Seminar Series

October 10, 2016
IEN Industry seminar provides insight on mass flow measurement and control issues for high-purity manufacturing applications.

SEMICON West 2016: New High-Speed EtherCAT® Mass Flow Controllers from Brooks Instrument

July 11, 2016
Powerfully enhanced GF100 Series MFCs will help improve semiconductor process performance, productivity and yields.