Skip To Content
Products Mass Flow Controllers Elastomer Sealed 5850E Series
Questions? Call 1-888-554-3569

5850E Series Thermal Mass Flow Controllers & Meters

Long-term device stability keeps your production on-target.
Models 5850E / 5851E / 5860E / 5861E / 5853E / 5863E

Every product line has a workhorse — our 5850E Series thermal mass flow controllers fit the bill. Actively in use for decades in thousands of applications worldwide, they utilize a unique, extremely stable flow sensor to provide the reliable, accurate and repeatable measurement and control that today’s demanding industrial manufacturing processes require.

Questions?

Talk to one of our application engineering experts by calling: 1-888-554-3569


For pricing information:

Request a Quote
5850E & i Series Data Sheet

Features

  • Long-term zero stability of <0.2% full scale per year
  • Fast flow response to command changes with negligible overshoot/undershoot
  • Wide range of flow ratings - from 3 sccm up to 1000 slpm
  • High pressure rating - up to 1,500 psi
  • Removable flow sensor
  • Insensitive to mounting attitude
  • Mechanically and electrically compatible with other mass flow controllers
  • Electrically activated valve override
  • Corrosion-resistant valve

Benefits

  • Proven long-term stability and accuracy across broad process and application range
  • Excellent return on investment due to reliable performance
  • Removable flow sensor eliminates need for continuous monitoring and readjustment of gas pressures
  • Easily installed and serviced due to analog only input/outputs

Applications

  • Chemical and petrochemical catalyst research and pilot processes
  • Laboratory and analytical systems
  • Life sciences bioreactors
  • Solar
{47A41DAF-F923-4FBC-B7B5-C1AF2D07356B}
Product Type
Mass Flow Controller
{06E05EA3-649D-4E7D-84C2-48A3895F605A}
Differentiator

Proven Reliable Performance

Long Term Stability

Easy to Change Range and Recalibrate in the Field

{8EACF6B9-E446-4C53-A08B-4FC83A8679D4}
Performance
{BFF72180-66CD-45F4-B3C7-569E7735282C}
Flow Range (Full Scale Capacity)

0 - 1000 slpm

{DD3F1766-CA6E-4E7A-8ECA-49BE94AC839A}
Accuracy

1% of FS

1.5% of FS > 20 slpm

{A9CE8B91-15DA-496E-BBF1-F29B8A7D403C}
Repeatability

0.25% of Rate

{A667D636-B2F4-4D60-BB4B-1B108ECD161A}
Linearity

Included in accuracy

{5CAA5CF3-00D4-4A27-A958-F6DEEC3F4291}
Response Time

E Series Controllers: < 3 seconds

Meters: 6 Seconds

{6029CBB8-106E-4EFD-A1A1-7C68EBC730D5}
Multi-Gas & Range Configurability

—

{A2ED6DC6-6A4D-4188-83F0-389C10122E9D}
Max Pressure

Controllers: 1500 psig

Meters: up to 4500 psig on some models

{EB163BE1-B960-462A-9A71-600C74706F7A}
Control Range

50:1

{3D72E8F7-4436-4B0E-B829-4CCFC3E5EBF2}
Zero Stability

< 0.2% F.S. per year

{DFCBEC34-9D14-40E5-8471-2CDACA3A9424}
Flow Temperature Coefficient

Zero: <0.075% of F.S per oC

Span: <1.0% of S.P. over 10-50 oC

{42AD4D0D-A3AD-4A2D-8FAA-ADC264759689}
Input / Output

0-5 Vdc

{FA4F562F-3445-4D00-9329-7C0989B735CF}
Ratings
{5386FAF9-E051-496F-AE1B-E57B8207825A}
Max Temperature
65oC
{102EDBA6-1F3E-44FF-893C-9C83D418A31A}
Mechanical

{903E9072-A3DC-4B6C-8581-A4338946E810}
Seal Material
Elastomer Seal
{7EFA0C68-3C73-4CE9-8BA7-FA8FEDF9E76E}
Diagnostics

{CF714A50-3FC6-4DF9-AED9-6B7890055586}
Diagnostic Capability
—
{204B70BA-8D85-4958-8DBE-0E5D1C3C6618}
Electrical

{6F969BA0-06A3-48F6-BCD7-B72E57D11B0C}
Analog Communication

0-5 Vdc

{773707F0-163F-4280-A035-3D4635431B9F}
Digital Communication

—

{3851E63F-5F7E-4CD6-8548-067728902032}
Electrical Connection
D-type connector
{578E1305-83C6-48B7-B19A-D0C027845B88}
Power Supply / Consumption

< 10.5 watts

{FCA18F5F-CCB2-4799-9629-782182A84917}
Compliance
{7DAE2917-6E62-4546-83C6-8709497A16AC}
Certifications/Approvals
—
5850E 5851E 5860E 5861E 5853E 5863E
Product Type Mass Flow Controller Mass Flow Controller Mass Flow Meter Mass Flow Meter Mass Flow Controller Mass Flow Meter
Differentiator

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range

Device Type

Flow Range
Flow Range (Full Scale Capacity)

Up to 30 slpm

 10 - 100 slpm Up to 30 slpm 10 - 100 slpm 100 -1000 slpm 100 - 1000 slpm
Max Pressure 1500 psi 1500 psi / 100 bar

4500 psi

4500 psi

1500 psi

1500 psi
Accuracy

1.0% F.S. < 20 SLPM

1.5% F.S. 20-50 SLPM

 1% full scale including linearity at calibrated conditions

1.0% F.S. < 20 SLPM

1.5% F.S. 20-50 SLPM

1% full scale including linearity at calibrated conditions

1% full scale including linearity at calibrated conditions

1% full scale including linearity at calibrated conditions
Repeatability 0.25% Rate 0.25% Rate 0.25% Rate 0.25% Rate 0.25% Rate 0.25% Rate
Response Time

3 seconds within 2% of full scale (0-100% command step)

3 seconds within 2% of full scale (0-100% command step)

3 seconds within 2% of full scale (0-100% command step)

3 seconds within 2% of full scale (0-100% command step)

3 seconds within 2% of full scale (0-100% command step)

3 seconds within 2% of full scale (0-100% command step)
Multi-Gas & Range Configurability

N/A

N/A

N/A

N/A

N/A

N/A
Diagnostic Capability

Manual

Manual

Manual

Manual

Manual

Manual
Analog Communication

0-5 Vdc

0-5 Vdc

0-5 Vdc

0-5 Vdc

0-5 Vdc

0-5 Vdc

Digital Communication

N/A

N/A

N/A

N/A

N/A

N/A
Electrical Connection D-type connector D-type connector D-type connector D-type connector D-type connector D-type connector
Filename File Type Documents By Language
Data Sheet pdf English Chinese
Installation & Operation Manual - 5850E pdf English
Installation & Operation Manual - 5850i pdf English
Installation & Operation Manual - 5851E pdf English
Installation & Operation Manual - 5851i pdf English
Installation & Operation Manual - 5853, 5863 pdf English
Installation & Operation Manual - 5860E pdf English
Installation & Operation Manual - 5860i pdf English
Installation & Operation Manual - 5861E pdf English
Installation & Operation Manual - 5861i pdf English
0250 Series
0250 Series
Controls and powers up to 4 devices