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Home Products Mass Flow Controllers Elastomer Sealed

Elastomer Sealed Thermal Mass Flow Controllers & Meters

Proven flexibility for a wide range of mass flow needs.

Our elastomer sealed mass flow meters and controllers combine the accuracy, reliability and repeatability your processes require with cost-effective instruments that deliver precise performance and long-term stability. The result: You will maximize the value and return on investment your operations require.

Key Applications

  • Chemical and petrochemical analysis and pilot processes
  • Laboratory and analytical systems
  • Life sciences bioreactors
  • Thin film vapor deposition
  • Heat treating, cutting and other thermal processes
  • Vacuum applications
Select the mass flow device that best serves your process requirements.

PRODUCTS

SLA Series
SLA Series
GF40 Series
GF40 Series
5850E and i Series
5850E and i Series
SLAMf Series
SLAMf Series
4800 Series
4800 Series
5700 Series
5700 Series
Product Type Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Meter
Differentiator

Wide Flow & Pressure Range

Superior Long-term Stability

High Accuracy

High Accuracy

MultiFlo™ Capability

Compact Size

Suitable for Full Suite of Gases

Proven Reliable Performance

Long Term Stability

Easy to Change Range and Recalibrate in the Field

NEMA 4X/IP66 Approved Enclosure

Perfect for Hose Down/Wash Down Applications

Hazardous Area Approvals

 

Ultra-fast Response Times

Optional Local Operator Interface

Compact Size

Suitable for Non-corrosive Gases

Economical

Compact

Ideal Upgrade from Volumetric Devices
Flow Range (Full Scale Capacity) .003 - 2500 slpm 3 sccm - 50 slpm

0 - 1000 slpm

 .003 - 2500 slpm 50 sccm - 40 slpm

0  - 50 slpm
Seal Material Elastomer Seal

Stainless Steel
Max Pressure

.003-200 slpm: 1500 psi/103 bar

100 - 2500 slpm: 1000 psi/70 bar

Optional 4500 psi/310 bar on 50 slpm max device

150 psig/10 bar

Controllers: 1500 psig

Meters: up to 4500 psig on some models

Up to 100 lpm: 1500 psi/100 bar

Up to 50 lpm: 4500psi/310 bar (optional)

100-2500 lpm:  1000 psi/70 bar

150 psig/10 barg

150 psig
Accuracy

Includes uncertainty from reference standards

0.9% of SP (20-100% FS)

0.18% of FS (2-20% FS)

1-50 slpm: 0.18% of SP (1-20% FS)

1100 slpm up to 2500 slpm: 1.0% of FS

1% of SP 35-100%, 0.35% of FS 2-35%

1% of FS

1.5% of FS > 20 slpm

Up to 100 lpm: 0.90% of SP (20-100% FS)

0.18% of FS (2-20% FS, 1-20% FS from 1 - 50 lpm)

100 - 2500 lpm: 0.90% of SP (20-100% FS)

100 - 1100 lpm: 0.18% of FS (2-20% FS)

1100 - 2500 lpm: 1.0% of FS

3.0% of FS

1.0% of FS (optional)
Repeatability

0.20% SP

0.20% SP

0.25% of Rate

0.20% SP

0.15% FS

0.50% FS
Multi-Gas & Range Configurability

Standard

 MultiFlo™ Available

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Standard

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Diagnostic Capability Available

— Available

Available

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Analog Communication

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

0-5 V, 0-10 V
0-20 mA, 4-20 mA

0-5 Vdc
0-20 mA
4-20 mA

0-5 Vdc
4-20 mA

0-5 V into 1000 ohms or greater
Digital Communication DeviceNet™
EtherCAT®
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
RS-485 

DeviceNetTM
EtherCAT®
Profibus®
RS485

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 DeviceNet™
FOUNDATIONTM Fieldbus
Profibus®
RS485





RS232

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Size Medium Medium Large
Certifications/Approvals

ISO/IEC 17025:2005
CE: EMC Directive 2014/30/EU
Directive 2011/65/EU

UL (Recognized):
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22

ATEX: II 3 G Ex nA IIC T4 Gc

IECEx: II 3 G Ex nA IIC T4 Gc

KOSHA: Ex nA IIC T4

CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Safety EN61010-1

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ISO/IEC 17025:2005

CE: EMC, RoHs, PED

UL Listed/Recognized:

Class 1, Div 2, Group A,B,C,D

Class 1, Zone 2, IIC T4, Class II, Zone 22

ATEX:

II 3 G Ex nA IIC T4 Gc 

II 3 D Ex tc IIIC T 85°C Dc

IECEx:

Ex nA IIC T4 Gc 

Ex tc IIIC T 85°C Dc 

KOSHA:

Ex nA IIC T4

Ex tc IIIC T85°C Dc

ATEX Zone 2

CSA Div 2/Zone 2 (Recognized)

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