|
SLA Series
|
GF40 Series
|
5850E and i Series
|
SLAMf Series
|
4800 Series
|
5700 Series
|
|
Product Type
|
Mass Flow Controller |
Mass Flow Controller |
Mass Flow Controller |
Mass Flow Controller |
Mass Flow Controller |
Mass Flow Meter |
|
Differentiator
|
Wide Flow & Pressure Range
Superior Long-term Stability
High Accuracy |
High Accuracy
MultiFlo™ Capability
Compact Size
Suitable for Full Suite of Gases |
Proven Reliable Performance
Long Term Stability
Easy to Change Range and Recalibrate in the Field |
NEMA 4X/IP66 Approved Enclosure
Perfect for Hose Down/Wash Down Applications
Hazardous Area Approvals
|
Ultra-fast Response Times
Optional Local Operator Interface
Compact Size
Suitable for Non-corrosive Gases |
Economical
Compact
Ideal Upgrade from Volumetric Devices |
|
Flow Range (Full Scale Capacity)
|
.003 - 2500 slpm |
3 sccm - 50 slpm |
0 - 1000 slpm |
.003 - 2500 slpm |
50 sccm - 40 slpm |
0 - 50 slpm |
|
Seal Material
|
Elastomer Seal |
Elastomer Seal |
Elastomer Seal |
Elastomer Seal |
Elastomer Seal |
Stainless Steel |
|
Max Pressure
|
.003-200 slpm: 1500 psi/103 bar
100 - 2500 slpm: 1000 psi/70 bar
Optional 4500 psi/310 bar on 50 slpm max device |
150 psig/10 bar |
Controllers: 1500 psig
Meters: up to 4500 psig on some models |
Up to 100 lpm: 1500 psi/100 bar
Up to 50 lpm: 4500psi/310 bar (optional)
100-2500 lpm: 1000 psi/70 bar |
150 psig/10 barg |
150 psig |
|
Accuracy
|
17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)
±0.6% of SP (20-100% FS)
±0.12% of FS (<20% FS)
1100 slpm up to 2500 slpm: ±0.6% of FS
Standard Devices (includes uncertainty from reference standards
±0.9% of SP (20-100% FS)
±0.18% of FS (2-20% FS)
1100 slpm up to 2500 slpm: ±1.0% of FS |
1% of SP 35-100%, 0.35% of FS 2-35% |
1% of FS
1.5% of FS > 20 slpm |
17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)
±0.6% of SP (20-100% FS)
±0.12% of FS (<20% FS)
1100 slpm up to 2500 slpm: ±0.6% of FS
Standard Devices (includes uncertainty from reference standards
±0.9% of SP (20-100% FS)
±0.18% of FS (2-20% FS)
1100 slpm up to 2500 slpm: ±1.0% of FS |
3.0% of FS
1.0% of FS (optional) |
5% of FS including linearity |
|
Repeatability
|
0.20% SP |
0.20% SP |
0.25% of Rate |
0.20% SP |
0.15% FS |
0.50% FS |
|
Multi-Gas & Range Configurability
|
Standard |
MultiFlo™ Available |
— |
Standard |
— |
— |
|
Diagnostic Capability
|
Available
|
Available |
— |
Available
|
Available |
— |
|
Analog Communication
|
0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA |
0-5 V, 0-10 V
0-20 mA, 4-20 mA |
0-5 Vdc
0-20 mA
4-20 mA |
0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA
|
0-5 Vdc
4-20 mA
|
0-5 V into 1000 ohms or greater
|
|
Digital Communication
|
DeviceNet™
EtherCAT®
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
PROFINET
RS-485
|
DeviceNetTM
EtherCAT®
Profibus®
RS485 |
—
|
DeviceNet™
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
PROFINET
RS-485
|
RS232
|
—
|
|
Size
|
Medium |
Compact |
Medium |
Large |
Compact |
Compact |
|
Certifications/Approvals
|
ISO/IEC 17025:2005
CE: EMC Directive 2014/30/EU
Directive 2011/65/EU
UL (Recognized):
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22
ATEX: II 3 G Ex nA IIC T4 Gc
IECEx: II 3 G Ex nA IIC T4 Gc
KOSHA: Ex nA IIC T4
|
CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Safety EN61010-1
|
— |
ISO/IEC 17025:2005
CE: EMC, RoHs, PED
UL Listed/Recognized:
Class 1, Div 2, Group A,B,C,D
Class 1, Zone 2, IIC T4, Class II, Zone 22
ATEX:
II 3 G Ex nA IIC T4 Gc
II 3 D Ex tc IIIC T 85°C Dc
IECEx:
Ex nA IIC T4 Gc
Ex tc IIIC T 85°C Dc
KOSHA:
Ex nA IIC T4
Ex tc IIIC T85°C Dc |
ATEX Zone 2
CSA Div 2/Zone 2 (Recognized) |
— |