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Elastomer Sealed Thermal Mass Flow Controllers & Meters

Proven flexibility for a wide range of mass flow needs.

Our elastomer sealed mass flow meters and controllers combine the accuracy, reliability and repeatability your processes require with cost-effective instruments that deliver precise performance and long-term stability. The result: You will maximize the value and return on investment your operations require.

Key Applications

  • Chemical and petrochemical analysis and pilot processes
  • Laboratory and analytical systems
  • Life sciences bioreactors
  • Thin film vapor deposition
  • Heat treating, cutting and other thermal processes
  • Vacuum applications
Select the mass flow device that best serves your process requirements.

PRODUCTS

SLA Series
SLA Series
GF40 Series
GF40 Series
5850E and i Series
5850E and i Series
SLAMf Series
SLAMf Series
4800 Series
4800 Series
5700 Series
5700 Series
Product Type Mass Flow Controller
Differentiator

Wide Flow & Pressure Range

Superior Long-term Stability

High Accuracy

High Accuracy

MultiFlo™ Capability

Compact Size

Suitable for Full Suite of Gases

Proven Reliable Performance

Long Term Stability

Easy to Change Range and Recalibrate in the Field

NEMA 4X/IP66 Approved Enclosure

Perfect for Hose Down/Wash Down Applications

Hazardous Area Approvals

 

Ultra-fast Response Times

Optional Local Operator Interface

Compact Size

Suitable for Non-corrosive Gases

Economical

Compact

Ideal Upgrade from Volumetric Devices

Flow Range (Full Scale Capacity) .003 - 2500 slpm 3 sccm - 50 slpm

0 - 1000 slpm

.003 - 2500 slpm 50 sccm - 40 slpm

0  - 50 slpm

Seal Material Elastomer Seal Elastomer Seal Elastomer Seal Elastomer Seal Elastomer Seal

Stainless Steel

Max Pressure

.003-200 slpm: 1500 psi/103 bar

100 - 2500 slpm: 1000 psi/70 bar

Optional 4500 psi/310 bar on 50 slpm max device

150 psig/10 bar

Controllers: 1500 psig

Meters: up to 4500 psig on some models

Up to 100 lpm: 1500 psi/100 bar

Up to 50 lpm: 4500psi/310 bar (optional)

100-2500 lpm:  1000 psi/70 bar

150 psig/10 barg

150 psig

Accuracy

Includes uncertainty from reference standards

0.9% of SP (20-100% FS)

0.18% of FS (2-20% FS)

1-50 slpm: 0.18% of SP (1-20% FS)

1100 slpm up to 2500 slpm: 1.0% of FS

1% of SP 35-100%, 0.35% of FS 2-35%

1% of FS

1.5% of FS > 20 slpm

Up to 100 lpm: 0.90% of SP (20-100% FS)

0.18% of FS (2-20% FS, 1-20% FS from 1 - 50 lpm)

100 - 2500 lpm: 0.90% of SP (20-100% FS)

100 - 1100 lpm: 0.18% of FS (2-20% FS)

1100 - 2500 lpm: 1.0% of FS

3.0% of FS

1.0% of FS (optional)

5% of FS including linearity

Repeatability

0.20% SP

0.20% SP

0.25% of Rate

0.20% SP

0.15% FS

0.50% FS

Multi-Gas & Range Configurability

Standard

MultiFlo™ Available

Standard

Diagnostic Capability Available

Available

Available

Available

Analog Communication

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

0-5 V, 0-10 V
0-20 mA, 4-20 mA

0-5 Vdc
0-20 mA
4-20 mA

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA



0-5 Vdc
4-20 mA

0-5 V into 1000 ohms or greater

Digital Communication DeviceNet™
EtherCAT®
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
RS-485 

DeviceNetTM
EtherCAT®
Profibus®
RS485


DeviceNet™
FOUNDATIONTM Fieldbus
Profibus®
RS485





RS232


Size Medium Compact Medium Large

Compact

Compact

Certifications/Approvals

ISO/IEC 17025:2005
CE: EMC Directive 2014/30/EU
Directive 2011/65/EU

UL (Recognized):
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22

ATEX: II 3 G Ex nA IIC T4 Gc

IECEx: II 3 G Ex nA IIC T4 Gc

KOSHA: Ex nA IIC T4

CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Safety EN61010-1

ISO/IEC 17025:2005

CE: EMC, RoHs, PED

UL Listed/Recognized:

Class 1, Div 2, Group A,B,C,D

Class 1, Zone 2, IIC T4, Class II, Zone 22

ATEX:

II 3 G Ex nA IIC T4 Gc 

II 3 D Ex tc IIIC T 85°C Dc

IECEx:

Ex nA IIC T4 Gc 

Ex tc IIIC T 85°C Dc 

KOSHA:

Ex nA IIC T4

Ex tc IIIC T85°C Dc

ATEX Zone 2

CSA Div 2/Zone 2 (Recognized)