Elastomer Sealed Thermal Mass Flow Controllers & Meters

Proven flexibility for a wide range of mass flow needs.

Our elastomer sealed mass flow meters and controllers combine the accuracy, reliability and repeatability your processes require with cost-effective instruments that deliver precise performance and long-term stability. The result: You will maximize the value and return on investment your operations require.

Key Applications

Chemical and petrochemical analysis and pilot processes
Laboratory and analytical systems
Life sciences bioreactors
Thin film vapor deposition
Heat treating, cutting and other thermal processes
Vacuum applications

Select the mass flow device that best serves your process requirements.

PRODUCTS

	SLA Series	GF40 Series	5850E and i Series	SLAMf Series	4800 Series	5700 Series
Product Type	Mass Flow Controller	Mass Flow Controller	Mass Flow Controller	Mass Flow Controller	Mass Flow Controller	Mass Flow Meter
Differentiator	Wide Flow & Pressure Range Superior Long-term Stability High Accuracy	High Accuracy MultiFlo™ Capability Compact Size Suitable for Full Suite of Gases	Proven Reliable Performance Long Term Stability Easy to Change Range and Recalibrate in the Field	NEMA 4X/IP66 Approved Enclosure Perfect for Hose Down/Wash Down Applications Hazardous Area Approvals	Ultra-fast Response Times Optional Local Operator Interface Compact Size Suitable for Non-corrosive Gases	Economical Compact Ideal Upgrade from Volumetric Devices
Flow Range (Full Scale Capacity)	.003 - 2500 slpm	3 sccm - 50 slpm	0 - 1000 slpm	.003 - 2500 slpm	50 sccm - 40 slpm	0 - 50 slpm
Seal Material	Elastomer Seal	Elastomer Seal	Elastomer Seal	Elastomer Seal	Elastomer Seal	Stainless Steel
Max Pressure	.003-200 slpm: 1500 psi/103 bar 100 - 2500 slpm: 1000 psi/70 bar Optional 4500 psi/310 bar on 50 slpm max device	150 psig/10 bar	Controllers: 1500 psig Meters: up to 4500 psig on some models	Up to 100 lpm: 1500 psi/100 bar Up to 50 lpm: 4500psi/310 bar (optional) 100-2500 lpm: 1000 psi/70 bar	150 psig/10 barg	150 psig
Accuracy	Includes uncertainty from reference standards 0.9% of SP (20-100% FS) 0.18% of FS (2-20% FS) 1-50 slpm: 0.18% of SP (1-20% FS) 1100 slpm up to 2500 slpm: 1.0% of FS		1% of FS 1.5% of FS > 20 slpm	Up to 100 lpm: 0.90% of SP (20-100% FS) 0.18% of FS (2-20% FS, 1-20% FS from 1 - 50 lpm) 100 - 2500 lpm: 0.90% of SP (20-100% FS) 100 - 1100 lpm: 0.18% of FS (2-20% FS) 1100 - 2500 lpm: 1.0% of FS	3.0% of FS 1.0% of FS (optional)	5% of FS including linearity
Repeatability	0.20% SP	0.20% SP	0.25% of Rate	0.20% SP	0.15% FS	0.50% FS
Multi-Gas & Range Configurability	Standard	MultiFlo™ Available	—	Standard	—	—
Diagnostic Capability	Available	Available	—	Available	Available	—
Analog Communication	0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA	0-5 V, 0-10 V 0-20 mA, 4-20 mA	0-5 Vdc 0-20 mA 4-20 mA	0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA	0-5 Vdc 4-20 mA	0-5 V into 1000 ohms or greater
Digital Communication	DeviceNet™ EtherCAT® EtherNet/IP™ FOUNDATION^TM Fieldbus Profibus® PROFINET RS-485	DeviceNet^TM EtherCAT® Profibus® RS485	—	DeviceNet™ EtherNet/IP™ FOUNDATION^TM Fieldbus Profibus® PROFINET RS-485	RS232	—
Size	Medium	Compact	Medium	Large	Compact	Compact
Certifications/Approvals	ISO/IEC 17025:2005 CE: EMC Directive 2014/30/EU Directive 2011/65/EU UL (Recognized): Class I, Div 2, Group A, B, C, D Class I, Zone 2, IIC T4 Class II, Zone 22 ATEX: II 3 G Ex nA IIC T4 Gc IECEx: II 3 G Ex nA IIC T4 Gc KOSHA: Ex nA IIC T4	CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing) Safety EN61010-1	—	ISO/IEC 17025:2005 CE: EMC, RoHs, PED UL Listed/Recognized: Class 1, Div 2, Group A,B,C,D Class 1, Zone 2, IIC T4, Class II, Zone 22 ATEX: II 3 G Ex nA IIC T4 Gc II 3 D Ex tc IIIC T 85°C Dc IECEx: Ex nA IIC T4 Gc Ex tc IIIC T 85°C Dc KOSHA: Ex nA IIC T4 Ex tc IIIC T85°C Dc	ATEX Zone 2 CSA Div 2/Zone 2 (Recognized)	—

Elastomer Sealed Thermal Mass Flow Controllers & Meters

Key Applications

PRODUCTS

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