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SLA Series
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GF40 Series
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5850E and i Series
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SLAMf Series
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4800 Series
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5700 Series
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Product Type
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Mass Flow Controller
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Mass Flow Controller
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Mass Flow Controller
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Mass Flow Controller
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Mass Flow Controller
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Mass Flow Meter
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Differentiator
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Wide Flow & Pressure Range
Superior Long-term Stability
High Accuracy
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High Accuracy
MultiFlo™ Capability
Compact Size
Suitable for Full Suite of Gases
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Proven Reliable Performance
Long Term Stability
Easy to Change Range and Recalibrate in the Field
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NEMA 4X/IP66 Approved Enclosure
Perfect for Hose Down/Wash Down Applications
Hazardous Area Approvals
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Ultra-fast Response Times
Optional Local Operator Interface
Compact Size
Suitable for Non-corrosive Gases
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Economical
Compact
Ideal Upgrade from Volumetric Devices
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Flow Range (Full Scale Capacity)
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.003 - 2500 slpm
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3 sccm - 50 slpm
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0 - 1000 slpm
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.003 - 2500 slpm
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50 sccm - 40 slpm
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0 - 50 slpm
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Seal Material
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Elastomer Seal
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Elastomer Seal
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Elastomer Seal
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Elastomer Seal
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Elastomer Seal
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Stainless Steel
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Max Pressure
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.003-200 slpm: 1500 psi/103 bar
100 - 2500 slpm: 1000 psi/70 bar
Optional 4500 psi/310 bar on 50 slpm max device
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150 psig/10 bar
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Controllers: 1500 psig
Meters: up to 4500 psig on some models
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Up to 100 lpm: 1500 psi/100 bar
Up to 50 lpm: 4500psi/310 bar (optional)
100-2500 lpm: 1000 psi/70 bar
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150 psig/10 barg
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150 psig
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Accuracy
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17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)
±0.6% of SP (20-100% FS)
±0.12% of FS (<20% FS)
1100 slpm up to 2500 slpm: ±0.6% of FS
Standard Devices (includes uncertainty from reference standards
±0.9% of SP (20-100% FS)
±0.18% of FS (2-20% FS)
1100 slpm up to 2500 slpm: ±1.0% of FS
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1% of SP 35-100%, 0.35% of FS 2-35%
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1% of FS
1.5% of FS > 20 slpm
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17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)
±0.6% of SP (20-100% FS)
±0.12% of FS (<20% FS)
1100 slpm up to 2500 slpm: ±0.6% of FS
Standard Devices (includes uncertainty from reference standards
±0.9% of SP (20-100% FS)
±0.18% of FS (2-20% FS)
1100 slpm up to 2500 slpm: ±1.0% of FS
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3.0% of FS
1.0% of FS (optional)
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5% of FS including linearity
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Repeatability
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0.20% SP
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0.20% SP
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0.25% of Rate
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0.20% SP
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0.15% FS
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0.50% FS
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Multi-Gas & Range Configurability
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Standard
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MultiFlo™ Available
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—
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Standard
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—
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—
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Diagnostic Capability
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Available
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Available
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—
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Available
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Available
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—
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Analog Communication
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0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA
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0-5 V, 0-10 V
0-20 mA, 4-20 mA
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0-5 Vdc
0-20 mA
4-20 mA
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0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA
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0-5 Vdc
4-20 mA
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0-5 V into 1000 ohms or greater
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Digital Communication
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DeviceNet™
EtherCAT®
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
PROFINET
RS-485
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DeviceNetTM
EtherCAT®
Profibus®
RS485
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—
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DeviceNet™
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
PROFINET
RS-485
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RS232
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Size
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Medium
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Compact
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Medium
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Large
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Compact
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Compact
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Certifications/Approvals
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ISO/IEC 17025:2005
CE: EMC Directive 2014/30/EU
Directive 2011/65/EU
UL (Recognized):
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22
ATEX: II 3 G Ex nA IIC T4 Gc
IECEx: II 3 G Ex nA IIC T4 Gc
KOSHA: Ex nA IIC T4
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CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Safety EN61010-1
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—
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ISO/IEC 17025:2005
CE: EMC, RoHs, PED
UL Listed/Recognized:
Class 1, Div 2, Group A,B,C,D
Class 1, Zone 2, IIC T4, Class II, Zone 22
ATEX:
II 3 G Ex nA IIC T4 Gc
II 3 D Ex tc IIIC T 85°C Dc
IECEx:
Ex nA IIC T4 Gc
Ex tc IIIC T 85°C Dc
KOSHA:
Ex nA IIC T4
Ex tc IIIC T85°C Dc
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ATEX Zone 2
CSA Div 2/Zone 2 (Recognized)
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