Product Type
Mass Flow Controller
Differentiator
High Accuracy
MultiFlo™ Capability
Compact Size
Suitable for Full Suite of Gases
Flow Range (Full Scale Capacity)
3 sccm - 50 slpm
Accuracy
1% of SP 35-100%, 0.35% of FS 2-35%
Linearity
±0.5% FS (included in accuracy)
Response Time
Normally Closed Valve: 300 ms - <1 sec
Multi-Gas & Range Configurability
MultiFlo™ Available
Valve Shut Down
Closes valve when set point drops below 1.5% full scale
Zero Stability
<±0.5% FS per year
Pressure Coefficient
0.03% per psi (0-50psi N2)
Differential Pressure Range
3-860 sccm = 7-45 psid
861-7200 sccm = 15-45 psid
7201-55000 sccm = 25-45 psid
*Contact Brooks Technical Support for more information.
Leak Integrity
1x10-10 atm cc/sec He
Seal Material
Elastomer Seal
Surface Finish
32µ inch Ra
Wetted Materials
316 Stainless Steel, Hastelloy C-22, 1707 PH,43055
Valve Options
Normally Closed
Normally Open
Meter (no valve)
Diagnostic / Service Port
Analog Communication
0-5 V, 0-10 V
0-20 mA, 4-20 mA
Digital Communication
DeviceNetTM
EtherCAT®
Profibus®
RS485
Electrical Connection
DeviceNet™: 1 x M12 with threaded coupling nut (B)
EtherCAT®: 5-pin M8 with threaded coupling nut/2 x RJ45
Profibus®: 1 x 15-pin Male Sub-D/1 x 9-pin female Sub-D
RS485: 1 x 15-pin Male Sub-D, (A)
Power Supply / Consumption
Analog / RS-485
From +12 Vdc to +24 Vdc: 7 Watt/8 Watt
DeviceNet™
From +11 Vdc to +25 Vdc: 7 Watt/8 Watt
EtherCAT® / Profibus®
From +13.5 Vdc to +27 Vdc: 7 Watt/8 Watt
Certifications/Approvals
CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Safety EN61010-1
Environmental Compliance
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006