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HOLIDAY HOURS: All Brooks Instrument facilities in the USA will be closed December 23, 26, 30 and January 2. For holiday hours of our facilities across the globe, please contact the specific location directly.

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Semiconductor Products

Ultra-high purity products for advanced semiconductor processes.

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SLA5800 Series Elastomer Sealed MFC with EtherCAT

The Speed of EtherCAT®

Considering EtherCAT® for new equipment or processes? Looking to switch from analog to digital communications? Just released - our SLA5800 Series MFCs equipped with the high-speed EtherCAT® interface. Talk to one of our applications engineers today.

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PITTCON 2017

Visit us at PITTCON: March 6-9, Chicago, USA

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