{BCA9C0AC-E96E-4B94-AE15-7B4228262145}
製品タイプ
Mass Flow Controller
{B246FED7-D61D-4FCD-919D-6C995CA5B0E7}
差別化要因
Wide Flow & Pressure Range
Superior Long-term Stability
High Accuracy
{CBF2CEFF-A229-420A-9035-CD04B4545A5B}
{5A23D76C-7B5E-4E89-9376-77F6304B45B9}
流量範囲（フルスケール容量）
.003 - 2500 slpm
{428A2EC5-4C25-4E09-81A6-545F4AB42529}
精度
17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)
±0.6% of SP (20-100% FS)
±0.12% of FS (<20% FS)
1100 slpm up to 2500 slpm: ±0.6% of FS
Standard Devices (includes uncertainty from reference standards
±0.9% of SP (20-100% FS)
±0.18% of FS (2-20% FS)
1100 slpm up to 2500 slpm: ±1.0% of FS
{230972BF-33D9-4EAC-955E-AA851F303FF0}
{234FC6FF-6AB6-4E86-AA76-01D885F78CB1}
{CC9E4BCC-488C-4071-9E07-B628DD74492B}
レスポンスタイム
0.003 - 100 slpm: <1 second
100 - 2500 slpm: <3 seconds
{ED6A2251-28D8-426E-BE29-E5A427527DA6}
{D3EECBE4-E4C4-480B-B7BC-3471E980693E}
最高圧力
.003-200 slpm: 1500 psi/103 bar
100 - 2500 slpm: 1000 psi/70 bar
Optional 4500 psi/310 bar on 50 slpm max device
{019F5616-217F-45C7-98FA-E1A1448DB24F}
Control Range
1-50 slpm: 100:1 Turndown for F.S.
50-2500 lpm: 50:1 Turndown for F.S.
{5DF8BF5E-B867-47E2-94A6-6E0B802CCE38}
{6BB26554-6972-43A0-8A21-78539BD33AA3}
Temperature Coefficient
Zero: <0.05% of F.S per oC
Span: <0.1% of S.P. per oC
{2E3B7CDB-D70E-4AF0-8A17-34BE54B6ACF8}
Pressure Coefficient
0.03% per psi (0-200 psi N2)
{9F025ABC-15B3-4DBB-85B6-FA5635B987B5}
Attitude Sensitivity
<0.2% F.S. maximum deviation from specified accuracy after re-zeroing
{DA1D3822-AE0E-44BC-8119-70E5A10AB8B7}
{61B5A28A-434C-4A06-8E5E-658CE44AFEFF}
{96E514EF-F0C4-4D65-AD22-3E75349C18D7}
Differential Pressure Range
Controllers
.003 - 50 lpm: 5 psi / 0.35 bar
50 - 100 lpm: 10 psi / 0.69 bar
500 lpm: 7.5 psi / 0.52 bar
1000 lpm: 14.5 psi / 1.00 bar
2500 lpm: 35.0 psi / 2.41 bar
{6C910163-3A2B-4347-B4B6-797AE098760A}
Leak Integrity
1x10-9 atm cc/sec He
{E5D9B237-7A80-4A23-B2AD-757FCF6E0172}
{9A184087-63A6-44C5-B07E-DDAB166E24F5}
{0EA6B211-0F14-4403-BC05-6C0AC667C3EB}
Wetted Materials
316L Stainless Steel
High Alloy Stainless Steel
Viton® Fluoroelastomers
Buna-N
Kalrez®
Teflon®/Kalrez®
EPDM
{AC829BE9-FFD8-4858-AE7C-D1D90864D3EA}
Valves
Normally Closed
Normally Open
Meter (no valve)
{413CB4D8-5055-468B-8E26-89970F8257E1}
{0B728A39-317A-400A-8386-1EA9B8CBB704}
{E0456E94-5D71-4AFD-B438-3EB3CF5ACE74}
Status Lights
MFC Health, Network Status
{3EBB4410-630B-4429-80F1-36DE58FDE1D1}
警報
Sensor Output
Control Valve Output
Over Temperature
Power Surge/Sag
Network Interruption
{2D5F0044-413E-49D3-8114-0AADBDBD69A8}
Diagnostic - Service Port
{1E73D34A-5790-43A8-A62A-A4B150C28FFD}
{7E36C0F3-2B6D-4140-88CB-93D8102240B1}
アナログ通信
0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA
{ED592BD2-3896-4E5A-9F82-971C781283FE}
デジタル通信
DeviceNet™
EtherCAT®
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
PROFINET
RS-485
{891ECC5C-09D5-4C00-BFAD-6C5F5863A253}
Electrical Connection
DeviceNet™: 1xM12 with threaded coupling nut (B)
EtherCAT®, EtherNet/IP™: 1x5-pin M8 with threaded coupling nut/2xRJ45
Profibus®: 1x15-pin Male Sub-D/1x9-pin female Sub-D
RS485: 1 x 15-pin Male Sub-D, (A)
{2ACAC3B8-6D09-4358-AB61-0C5492CAE460}
Power Supply - Consumption
Analog / Profibus® / RS-485
Valve Orifice > 0.032": 8 Watts
Valve Orifice ≤ 0.032": 5 Watts
Without Valve: 2 Watts
DeviceNet™ / EtherNet/IP™
Valve Orifice > 0.032": 10 Watts
Valve Orifice ≤ 0.032": 7 Watts
Without Valve: 4 Watts (DeviceNet™), 3 Watts (EtherNet/IP™)
EtherCAT®
Valve Orifice > 0.032": 8.5 Watts
Valve Orifice ≤ 0.032": 5.5 Watts
Without Valve: 2.5 Watts
{79F2EC4C-FB0C-4DF7-A2B4-CA70E0EC31A7}
{AD8FC90E-B0D9-487F-8EC6-4D24857161A8}
認定 / 承認
ISO/IEC 17025:2005
CE: EMC Directive 2014/30/EU
Directive 2011/65/EU
UL (Recognized):
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22
ATEX: II 3 G Ex nA IIC T4 Gc
IECEx: II 3 G Ex nA IIC T4 Gc
KOSHA: Ex nA IIC T4
{F058B188-C1EE-4978-A425-FDD3B2E17B2E}
環境法令遵守
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
{81B573EB-B510-4FC1-8696-780E74843FAD}