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MODELS: SLA5850 / SLA5851 / SLA5853 / SLA5860 / SLA5861 / SLA5863

SLA5800 Mass Flow Controllers & Meters

High-Performance Gas Flow Control with Exceptional Long-Term Stability

SLA5800 Series digital mass flow controllers and meters deliver precise, repeatable gas flow measurement and control across a wide range of industrial and life sciences applications. Combining high accuracy, exceptional long-term stability and flexible configuration options, the SLA5800 supports reliable process performance in demanding operating conditions.

With a broad range of flow rates, pressure ratings and digital communication options, the SLA5800 provides a versatile platform for applications ranging from bioprocessing and analytical instrumentation to chemical processing and fuel cell testing. Its modular design, multi-gas capability and advanced diagnostics help simplify system integration, reduce maintenance and maximize uptime.

Optimize your bioprocessing application with SLA Biotech Options Packages designed specifically to improve bioprocessing performance.

Features & Benefits
  • High Accuracy and Repeatability: Flow accuracy up to ±0.6% of set point and ±0.2% repeatability provide precise, consistent gas delivery for critical processes.
  • Exceptional Long-Term Zero Stability: Zero drift of less than 0.2% of full scale per year helps maintain process consistency while reducing recalibration requirements and total cost of ownership.
  • Wide Flow and Pressure Range: Flow rates from 0.003 to 2500 slpm and pressure ratings up to 1500 psi (optional 4500 psi) accommodate a broad range of operating requirements.
  • Programmable Multi-Gas/Multi-Range Capability: Store up to six gas calibrations in a single device, simplifying gas changes, reducing inventory and increasing application flexibility.
  • Flexible Communication Options: Native EtherNet/IP™, PROFINET, EtherCAT®, DeviceNet™, PROFIBUS, RS485 and analog communication options for easy integration with new and existing control systems.
  • Advanced Diagnostics and Alarms: Built-in diagnostics, configurable alarms and an independent service port simplify troubleshooting and support maximum system uptime.
  • Easy Configuration and Servicing: An embedded web-based interface on EtherNet/IP™ and PROFINET configurations simplifies setup, monitoring and troubleshooting. Brooks Expert Support Tool (BEST) software provides additional servicing capabilities, including valve tuning and calibration with a license key.
Applications
  • Bioprocessing and bioreactors
  • Chemical and petrochemical processing
  • Analytical instrumentation and laboratory research
  • Fuel cell testing and development
  • Gas mixing and blending systems
  • Industrial gas flow control

Technical White Paper

The MFC Upgrade Myth: Does Going Digital Mean More Validation?

Replacing aging mass flow controllers? Learn why transitioning from analog to EtherNet/IP or PROFINET may be easier than expected, and how a risk-based validation approach can help you unlock advanced diagnostics and greater process visibility.

Read the White Paper →
Mass Flow Controller (MFC): The Principle of Operation
Digital Thermal Mass Flow Meter for Bioprocessing and Other Life Sciences Applications
Thermal Mass Flow Meter with a High Turndown Ratio
Thermal Mass Flow Meter with EtherNet/IP or PROFINET Features a Web-based Interface
Brooks Expert Support Tool (BEST) Software: How-to Download, Install & Set-up on SLA5800 Series
How to Write LabVIEW™ Programs for a Mass Flow Meter
P1: How to Load the EtherNet/IP EDS Files for Thermal Mass Flow Meters
P2: How to Add a Device to the Network
P3: Testing Device Communications
Type of Media Gas
Flow Measuring Principle Thermal (TMF)
Flow Range .003 - 2500 slpm
Accuracy Range Up to ±0.6% of S.P. (20-100% FS) ±0.12% of FS (<20% FS)
Turndown Ratio 1-50 slpm: 100:1, 50-2500 lpm: 50:1
Repeatability 0.20% S.P.
Max Pressure 1500 psi
Operating Temperature -14°C - 65°C
Measure/Control Measure & Control (Controller), Measure Only (Meter)
Max Flow 2500 slpm
Max Flow 2500000 sccm
Max Operating Pressure 310 bar
Max Temperature 65 celsius
Seal Option Elastomer
Accuracy (% of rate) ±0.6%, ±0.9%
Connectivity RS485, DeviceNet, EtherCAT, Profibus, EtherNet/IP, PROFINET, Analog (0–5 V), Analog (0–10 V), Analog (0–20 mA), Analog (4–20 mA)
Filename
File Type
Documents by Language
Installation & Operation Manual
PDF
Quick Start Guide
PDF
SLA Biotech MFC At-a-Glance
PDF
DeviceNet™ Supplemental Manual - SLA5800 & SLAMF Series MFCs
PDF
EtherCAT® Supplemental Manual - SLA5800 & SLAMF Series MFCs
PDF
EtherNet/IP™ Supplemental Manual - SLA5800 & SLAMF Series MFCs
PDF
Profibus® Supplemental Manual - SLA5800 & SLAMF Series MFCs
PDF
PROFINET Supplemental Manual - SLA5800 & SLAMF Series MFCs
PDF
RS485-S Supplemental Manual - SLA5800 & SLAMF Series MFCs
PDF
Web-based Interface Supplemental Manual - SLA5800 & SLAMF Series MFCs
PDF
EU Declaration of Conformity
PDF
Declaration of Conformity to EU REACH
PDF

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: SLA5850 - 7 - 1B - 1 - A - RevB

Meter Series Digital Communications I/O Mechanical Connection (Body size 0 & 1 only) Valve Type Analog Communications I/O: Revision Level
SLA5850 EtherNet/IP 1B - 1/4” tube compression 1 - Normally closed A - None RevB
Filename
File Type