Product Type
Mass Flow Controller
Differentiator
Ultra-fast Response Times
Optional Local Operator Interface
Compact Size
Suitable for Non-corrosive Gases
Flow Range (Full Scale Capacity)
50 sccm - 40 slpm
Accuracy
3.0% of FS
1.0% of FS (optional)
Response Time
Normally Closed Valve: 300 ms - <1 sec
Multi-Gas & Range Configurability
—
Flow Temperature Coefficient
Differential Pressure Range
3-860 sccm = 7-45 psid
861-7200 sccm = 15-45 psid
7201-55000 sccm = 25-45 psid
*Contact Brooks Technical Support for more information.
Leak Integrity
1x10-10 atm cc/sec He
Seal Material
Elastomer Seal
Wetted Materials
316 Stainless Steel, Hastelloy C-22, 1707 PH,43055
Digital Communication
RS232
Input / Output
0-5 Vdc,
4-20 mA, RS-232 (Standard with all analog I/O options)
Electrical Connection
Two 15-pin D-sub connectors
- One for connection to the 4800 Series
- One for the remote connection
Power Supply / Consumption
+15 Vdc + 10% or +24 Vdc + 10%
Local Operator Interface
P/N: 273L156ZZZ
Display Area
28mm wide x 11mm high
Humidity
5 - 95% RH (ambient)
Power Adaptor
P/N: 641Z059AAA
Power Requirements
The LOI optionally includes a wall mount power adaptor with a 3.5-mm DC-plug. The adaptor works with input voltages of AC 90-240 V/47-63Hz. The adaptor supports European, U.K., Australia and U.S. wall plugs. Power can also be supplied by a remote connection via the D-connector.
EMC
EMC Directive 2004/108/EC: per EN 61326:2006
Certifications/Approvals
ATEX Zone 2
CSA Div 2/Zone 2 (Recognized)
Environmental Compliance
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006