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Products Pressure & Vacuum Mechanical Pressure Gauges, Regulators, Switches, Transmitters 122 Series Gauges
Questions? Call 1-888-554-3569

122 Series Mechanical Pressure Gauges

Reliable, efficient local pressure monitoring for high-purity applications.
Models S122 / C122 / F122

The Brooks Instrument 122 Series mechanical pressure gauges were designed and developed for the demanding high-purity applications of the semiconductor industry. Made of stainless steel, our mechanical pressure gauges feature an accuracy of 1% of full scale. These two inch gauges are durable measuring devices that come in a variety of process connections, pressure ranges, and socket orientations, offering a reliable and efficient way to monitor pressure locally.  Get precise, high-performance results from the world's leading pressure gauge supplier.

Questions?

Talk to one of our application engineering experts by calling: 1-888-554-3569


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122 Series Data Sheet

Features

  • Stainless steel movement providing precision performance
  • 316L stainless steel wetted parts
  • Gauges welded in oxygen-free chambers to meet rigid cleanliness and safety guidelines
  • Variety of models and pressure ranges to support specific design needs

Benefits

  • Mechanical pressure gauges offer durable and efficient ways to monitor pressure locally

Applications

  • Gas delivery systems and tools used for semiconductor processing, including:
    • Bulk gas
    • Gas cabinets
    • Gas distribution
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Product Type
Mechanical Pressure Gauges
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Differentiator

High-Purity

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Performance
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Pressure Range

- 30" - 4000 psi

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Accuracy
1% Full Scale
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Burst Pressure
400%
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Proof Pressure
110%
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Ratings
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Safety Relief
Unrestricted rear blow-out plug
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Helium Leak Check
4 x 10-9 Inboard Std. cc/sec
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Cleanliness
Cleaned for oxygen service to ANSI B40.1 level IV specifications
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Mechanical
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Housing
300 Series Stainless Steel, electropolished
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Bezel & Lens Material
One-piece polycarbonate, screw-on
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Socket Material
316L Stainless Steel
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Movement

300 Series Stainless Steel

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Bourdon Tube
316L Stainless Steel
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Process Connections

Face-seal male, Face-seal swivel male,

Face-seal swivel female and 1/4" NPT male

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Dial
White with Black markings, "Use no Oil" is red
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Surface Finish

Not Applicable

S122 C122 F122
Differentiator Socket Orientation Socket Orientation Socket Orientation
Pressure Range Vacuum - 4,000 psi Vacuum - 4,000 psi Vacuum - 4,000 psi
Accuracy 1% FS 1% FS 1% FS
Socket Orientation Stem Mounted

Center Back Mounted

Center Back Mounted with SS Front Flange
Filename File Type Documents By Language
Data Sheet pdf English