HOLIDAY HOURS: Our U.S. facilities will be closed on Monday, May 30th in recognition of Memorial Day. Normal business hours will resume on Tuesday, May 31st.

Skip To Content

122 Series Mechanical Pressure Gauges

Reliable, efficient local pressure monitoring for high-purity applications.
Models S122 / C122

The Brooks Instrument 122 Series mechanical pressure gauges were designed and developed for the demanding high-purity applications of the semiconductor industry. Made of stainless steel, our mechanical pressure gauges feature an accuracy of 1% of full scale. These two inch gauges are durable measuring devices that come in a variety of process connections, pressure ranges, and socket orientations, offering a reliable and efficient way to monitor pressure locally.  Get precise, high-performance results from the world's leading pressure gauge supplier.

Questions?

Talk to one of our application engineering experts by calling: 1-888-554-3569


For pricing information:

Request a Quote
122 Series Data Sheet

Features

  • Stainless steel movement providing precision performance
  • 316L stainless steel wetted parts
  • Gauges welded in oxygen-free chambers to meet rigid cleanliness and safety guidelines
  • Variety of models and pressure ranges to support specific design needs

Benefits

  • Mechanical pressure gauges offer durable and efficient ways to monitor pressure locally

Applications

  • Gas delivery systems and tools used for semiconductor processing, including:
    • Bulk gas
    • Gas cabinets
    • Gas distribution
{0611827E-BDAA-489D-B1E4-90280E983F1C}
Product Type
Mechanical Pressure Gauges
{58EE102D-966D-40FB-847A-4CE8A05E0390}
Differentiator

High-Purity

{8C1D9CF4-A047-47E5-8B60-DCA9345494D4}
Performance
{BCE97E3A-6AB4-4FF9-AA3C-DE8806BC5A98}
Pressure Range

- 30" - 4000 psi

{D5E3CCA9-7DB7-4529-9166-4D98263C7B70}
Accuracy
1% Full Scale
{9BF3C762-3A99-476E-8803-5B5699122EDA}
Burst Pressure
400%
{3FDCA61E-85EA-41BA-B093-4E1BE6D8043D}
Proof Pressure
110%
{96AFF225-26AB-415C-B9DD-B3204F27C8F7}
Ratings
{0702E29E-FE1E-4AAA-9CCA-87C8CADD4615}
Safety Relief
Unrestricted rear blow-out plug
{F38B86EC-6DA4-400F-85C7-C2DD796D2180}
Helium Leak Check
4 x 10-9 Inboard Std. cc/sec
{9E1347BE-6B8B-4E22-8450-248E460C1061}
Cleanliness
Cleaned for oxygen service to ANSI B40.1 level IV specifications
{6DED59C7-53DC-4A73-86C1-5D4199D961C3}
Mechanical
{2CE03364-084A-4FAE-A477-74D832523BA3}
Housing
300 Series Stainless Steel, electropolished
{278E35B0-C665-4348-B821-7A4AD6F2999E}
Bezel & Lens Material
One-piece polycarbonate, screw-on
{CE3DA0D6-5A16-4487-89C1-649516DAC2DC}
Socket Material
316L Stainless Steel
{D19E13DD-8E08-4337-B30A-586282BCE0FC}
Movement

300 Series Stainless Steel

{A5558470-8BFF-42B5-B293-834A69FA1BC4}
Bourdon Tube
316L Stainless Steel
{AF45CDCD-7B72-41C9-A00D-3FFB5A402667}
Process Connections

Face-seal male, Face-seal swivel male,

Face-seal swivel female and 1/4" NPT male

{057116C4-C19C-4EB0-8FC9-120C57D0B2AC}
Dial
White with Black markings, "Use no Oil" is red
{C7C38FE5-5267-483D-9763-8BFD673565A7}
Surface Finish

Not Applicable

S122 C122
Differentiator Socket Orientation Socket Orientation
Pressure Range Vacuum - 4,000 psi Vacuum - 4,000 psi
Accuracy 1% FS 1% FS
Socket Orientation Stem Mounted

Center Back Mounted

Filename File Type Documents By Language
Data Sheet pdf English