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SolidSense II® Pressure Transducers

Maximize process precision with accurate, stable, ultra-high purity control.
Models GF / GI

For measuring pressure in ultra-high purity and specialty gas applications across many industries, pressure transducers must maintain stability and accuracy. That's why Brooks Instrument SolidSense II® pressure transducers combine weld-free, corrosion-resistant materials along with design that delivers outstanding zero stability and accuracy within 0.25% of full scale.

We avoid the problems of zero and span drift, thermal shift and case stress that lead to maintenance and downtime issues with competitive transducers. Instead, SolidSense II® instruments deliver a robust, easy-to-maintain design that lowers the total cost of ownership.


Talk to one of our application engineering experts by calling: 1-888-554-3569

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SolidSense II® Series Data Sheet


  • Materials: High-temperature-annealed VIM-VAR 316L stainless steel body with one-piece, machined sensor
  • No welds or joints with dissimilar materials
  • Pressure range: 30 to 3000 psi full scale
  • Models available with integrated display or full-function programmable display
  • Digital thermal compensation uses multi-point temperature-compensation method
  • Proprietary micro-machined silicon strain gauges exhibit very low zero drift
  • Fully swept flow path completely removes residual gas
  • Outputs: 4 to 20 mA, 0 to 10 Vdc, 0.05 to 5.05 Vdc


  • Smooth surface finish and corrosion-resistant materials ensure contamination-free measurement – ideal for many semiconductor and industrial applications
  • Resistant to H2 embrittlement for longer life
  • Long-term, repeatable sensor performance under variable temperatures ensures reliable performance
  • Superior stability maintains accuracy
  • No initial zero adjustment reduces time spent on calibration
  • Two pairs of precision-matched strain gauge sensors ensure performance
  • Sensor attachment using glass fusion bonding relieves stress for longer life
  • Digital temperature compensation improves thermal stability over entire range of temperature


  • Semiconductor manufacturing
  • Ultra-high purity fluid storage and delivery systems
  • Thin-film processes
  • Chemical and petrochemical research
  • Laboratory and analytical projects
  • Food & beverage
  • Pharmaceuticals
Product Type

Pressure Transducers

Ultra-High Purity
Pressure Range
-15 psi - 3000 psi
Burst Pressure
400% full scale
Proof Pressure
200% full scale up to 2,000 psi, 150% full scale for higher ranges
0.25% Full Scale (BFSL)
Response Time
< 5 msec
Flow Temperature Coefficient

>100 PSI Ranges:  Full Scale:+0.02% full scale/OF (-4OF to 140OF, -20OC to 60OC) +0.50% full scale (68OF to 140OF, 20OC to 60OC) 0 to 10 Vdc version

<100 PSI Ranges:  Full Scale:+0.04% full scale/OF (-4OF to 140OF, -20OC to 60OC) +1.00% full scale (68OF to 140OF, 20OC to 60OC) 0 to 10 Vdc version

Materials of Construction
Housing: Stainless steel, polymer plastics
Surface Finish
Compliant with SEMI F19
Wetted Materials
VIM-VAR 316L stainless steel, SEMI F20
Compliant to ASTM F1374-92 (2005)
Internal Volume
Process Connections
Multiple configurations including tube, NPT, Face Seal and Surface Seal
Temperature Range

Non-display version: -20OF to 180OF (-29OC to 82OC)

Integrated Display Version:-20°F to 140°F (-29°C to 60°C)

Temperature - Compensating
-4OF to 140OF (-20OC to 60OC) / 68OF to 140OF (20OC to 60OC) 0-10 Vdc version
Temperature - Storage

Non-display: -40OF to 180OF (-40C to 82OC)

 Integrated display: -40°F to 167°F (-40°C to 75°C)

Analog Communication
0-5 Vdc, 0-10 Vdc, 0.2-5.2 Vdc, 2-10 Vdc, 4-20 mA

Supply Current

Non-display Version: Max. 10 mA

Integrated Display: Max. 30 mA

Power Requirements

Display Version:10 to 30 Vdc for 4 to 20 mA output     Integrated Display Version:15 to 30 Vdc for 4 to 20 mA output and no signal output

Display Version:11 to 30 Vdc for 0 to 5 Vdc output      Integrated Display Version:11 to 30 Vdc for 0 to 5 Vdc output

Display Version: 13 to 32 Vdc for 0 to 10 Vdc output   Integrated Display Version:13 to 30 Vdc for 0 to 10 Vdc output


EMC: Compliant to EU Directive 2004/108/EC

FM Approved: Non-Incendive for use in Class I, Div II Groups A, B, C and D Hazardous Applications

Environmental Compliance

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

Differentiator ATEX available

Integrated Display

Configuration Single-Ended Single-Ended
Pressure Range Vacuum - 4,000 psi Vacuum - 4,000 psi
Accuracy 1% FS 0.25% Full Scale (BFSL)
Output Type Analog Voltage or Current Analog Voltage or Current


Equipment Group II, category 3 G

Compliant to EU Directive 94/9/EC

FilenameFile TypeDocuments By Language
Data Sheet pdf English
Data Sheet - ATEX pdf English
Installation & Operation Manual pdf English
CE EU Declaration of Conformity Certificate pdf English
FilenameFile Type
CAD Listing
Accurate, miniature displays for point-of-use pressure monitoring.