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Brooks Instrument Legacy Products

Mass Flow Controllers

Brooks 5850S Mass Flow Controller

5800S Series

Elastomer Sealed Thermal Mass Flow Controllers

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Brooks Model 5816-Ex

Models 5816-EX, 5864-EX

Ex-Proof Mass Flow Controllers

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Brooks SLA5850 RevA mass flow meter

SLA5800 Series Revision A

Elastomer Sealed Thermal Mass Flow Controllers

Download Installation Manual
Download Data Sheet

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Brooks Control Valve 5835

Models 5835, 5836, 5837, 5838

Brooks MF Smart Series

MF Smart Series

Elastomer Sealed Thermal Mass Flow Controllers

Download Installation Manual

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Variable Area Flow Meters (Rotameters)

Brooks 1350E flow meter with valve

Sho-Rate Series 1350E/1355E

Brooks Full-View Glass Tube Flow Meter

Full-View® 1100 Series

Brooks 2001 variable area flow meter

2001 Series

Acrylic Tube Variable Area Flow Meters

Download Installation Manual

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Brooks MT3602 variable area flow meter

MT3600 Series

Brooks MT3809E variable area flow meter

MT3809E Series

Pressure & Vacuum Products

Brooks 5866 metal sealed pressure controller

Model 5866M

Vaporization Products

Brooks direct liquid injection vaporizer plate system

Direct Liquid Injection (DLI) Vaporizers

Secondary Electronics

Models 0151E and 0151i Flow Computers

Models 0151E, 0151i