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GF120xHT 金属密封高温质量流量控制器和流量计

高洁净度流道。卓越的性能和可靠性，适用于高温应用。

GF120xHT高温质量流量控制器(MFC)和流量计设计用于控制和测量来自液体或固体源的蒸气的质量流量，以支持这些前体在半导体制造过程中日益增长的使用。GF120xHT上的流量模块可以承受高达150°C的工作环境。为了支持这个温度范围，电子部件远程连接到设备的其余部分，并安装在较低温度的区域(最高50°C)。远程电子部件可以DIN安装，可选择三种不同的互连电缆长度- 3英尺，8英尺和16.5英尺的标准选项。广泛的通信协议和装配选择使GF120xHT成为下一代工艺设备和传统加热的MFC升级的理想选择。

下载数据表

介质类型	Gas
流量测量原理	Thermal (TMF)
流量范围	50 sccm - 5 slpm
精度范围	5-100% = ±0.15% of S.P., 2-5% = ±0.015% of F.S.
重复性	5-100% = ±0.15% of S.P., 2-5% = ±0.015% of F.S.
最大压力	500 psi
工作温度	45°C - 150°C
密封选项	Metal
測量/控制	Measure & Control (Controller)
最大流量	5 slpm
最高温度	150 celsius
精度（占流量百分比）	±1.0%
连接方式	Analog (0–5 V), DeviceNet, EtherCAT, RS485

文件名

文件类型

按语言分类的文档

Data Sheet - GF120xHT

PDF

English

Installation & Operation Manual - GF120xHT Series

PDF

English

DeviceNet™ Supplemental Manual - GF120xHT Series

PDF

English

EtherCAT® Supplemental Manual - GF120xHT Series

PDF

English

RS485 Supplemental Manual - GF120xHT Series

PDF

English

Use the following guide, based on model code information from the data sheet, to translate the filename of the CAD drawings available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: GF120xHT (model) - CX (fitting) - G1 (connector)

Model	Fitting	Connector
GF120xHT	BX - 1-1/2” body width, 92 mm W Seal	BX - Cable adapter to 15-pin D adapts G1 base
	CX - 1-1/8” body width, 92 mm C Seal	*DX - DeviceNet™ 5-pin micro
	LX - 1-1/8” body width, 92 mm C Seal w/Poke Yoke	EX - Cable adapter to Card Edge (w/o VTP), RS485 through RJ11 jacks adapts GX base
	VX - 1-1/8” body width, 124 mm 1-1/4” VCR male	GX - 9-Pin D with RS485 (Unit”G”), display and overlay 180 degree orientation
	WX - 1-1/8” body width, 92 mm W Seal	G1 - 9-Pin D with RS485 (Unit”G”)
		HX - Adapter to cardedge adapts to G1 base
		IX - Adapter to cardedge adapts to GX base
		JX - Cable adapter with 9-pin STEC pin-out & jack screws (w/VTP) adapts SX base
		KX - Cable adapter to MKS 15-pin D, adapts G1 base
		QX - Adapter to cardedge (w/out VTP) adapts to SX base
		SX - 9-pin D with STEC pin-out (w/VTP) (units “S“, “Q“)
		UX - Cable adapter to 15-pin D (w/VTP) adapts SX base