GF100 Metal Sealed Mass Flow Controllers & Meters
High purity flow path. Outstanding performance, reliability, and repeatability.
Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.
The result: increased process flexibility and efficiency combined with the industry’s highest levels of process gas purity to help maximize yields and productivity.
Features
- Long-term zero stability of <±0.5% full scale per year
- Settling times: 300 ms - <700 ms or 700 ms - <1 second
- Full-scale flow rates up to 300 slpm
- All-metal seal flow path: option for 5µ or 10µ inch Ra surface finish
- Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures
- MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
- Local display
- Optional SDS gas delivery
- Optional high-temperature model
- DeviceNetTM, RS-485 L-Protocol and analog interfaces
Applications
- Semiconductor etch tools
- Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
- Physical vapor deposition (PVD) systems
- Epitaxial process systems
- Advanced strip processes
Benefits
- High-performance components marathon tested to seven times semiconductor industry standards for reliability
- All metal, corrosion resistant flow path with reduced surface area and unswept volumes ensures faster dry-down during purge steps
- With MultiFloTM, new process gases and/or ranges can be set in under 60 seconds – no more removing and calibrating MFCs
- Highly configurable platform enables drop-in replacement and upgrade of most brands of metal sealed MFCs, including the former Celerity, Mykrolis, Tylan and UNIT brands
- Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
- GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes
- GF120xHT high-temperature mass flow controller can withstand operating environments of up to 150°C
How a Mass Flow Meter Addresses Flow Bursts with Zero Leak-by Valve Technology
| Type of Media | Gas |
|---|---|
| Flow Measuring Principle | Thermal (TMF) |
| Flow Range | Standard GF Series: 3 sccm - 55 slpm, High Flow GF Series: 55 slpm - 300 slpm |
| Accuracy Range | Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20%, High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35% |
| Turndown Ratio | Standard GF Series: 2-100%, High Flow GF Series: 5-100% |
| Repeatability | 5 - 100% = ±0.15% S.P, .2 - 5% = ±0.015% F.S. |
| Max Pressure | 500 psi |
| Operating Temperature | 10°C - 50°C |
| Measure/Control | Measure & Control (Controller), Measure Only (Meter) |
| Max Flow | 300 slpm |
| Max Temperature | 50 celsius |
| Seal Option | Metal |
| Accuracy (% of rate) | ±1.0% |
| Connectivity | RS485, DeviceNet |
Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.
Example: GF100 - AS - G1
| Meter Series | Fitting | Connector |
| GF1xx | AS - 1-1/2” body width, 92 mm 0.440” large bore C Seal (only for bins SH45-SH50) | BX - Cable adapter to 15 pin D Brooks (Unit “B”,”N”) adapts G1 base |
| CX - 1-1/8” body width, 92 mm C Seal | *DX - DeviceNet™ 5 pin micro | |
| VX - 1-1/2” body width, 124mm 1/4” VCR male | EX - Cable adapter to Card Edge (w/o VTP), RS485 through RJ11 jacks (Unit”E”; IN “L”, “R”) adapts GX base | |
| WX - 1-1/8” body width, 92mm W Seal | GX - 9-Pin D with RS485 (Unit”G”); display and overlay 180 degree orientation | |
| G1 - 9-Pin D with RS485 (Unit”G”) | ||
| SX - 9 pin D with STEC pin-out (w/VTP) (Unit”S”,”Q”) |