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Models: AMFC / AMFM

AMF Mass Flow Controller

A new benchmark in compact, high-performance flow control

The AMF Series (Advanced Mass Flow) is an ultra-compact, digital mass flow controller designed for precise gas flow control in space-constrained systems. Engineered for bioprocessing, thin film, and advanced industrial applications, it combines high performance, multi-gas capability, and advanced diagnostics in an ultra-small footprint.

Features & Benefits
  • Excellent Low-Flow Stability, ±0.6% Accuracy, ±0.25% Repeatability: Optimized for low-flow applications, AMF provides stable, repeatable gas delivery, supporting sensitive processes that require tight control and minimal variability.
  • Superior Sensor Stability: Long-term sensor stability minimizes drift, reducing the need for frequent recalibration and helping maintain consistent process performance.
  • Extremely Low Leak Rate & Excellent Valve Shutoff, Leak-by < 0.005 sccm: Advanced valve technology minimizes leak-by and ensures reliable shutoff, helping maintain system purity, improve yield, and reduce gas consumption.
  • Wide Control Range: Up to 1000:1 turndown allows a single mass flow controller to deliver accurate, stable performance from low to high flow conditions—reducing the need for multiple devices. 
  • Advanced Diagnostics & Alarms: Built-in diagnostics and configurable alarms provide real-time insight into device performance - helping identify potential issues before they impact the process.
  • Embedded Web Interface & Ethernet Connectivity:Ethernet/IP™ communication and an integrated web-based interface allow for easy configuration, monitoring, and integration into modern control systems.
Applications
  • Bioprocessing and benchtop bioreactors 
  • Thin film and advanced coatings 
  • Optical fiber manufacturing 
  • Gas mixing and analytical systems

 

Type of Media Gas
Flow Measuring Principle Thermal (TMF)
Flow Range Up to 27 slpm, 27,000 sccm
Accuracy Range ±0.6% of S.P. (20 - 100% F.S.), ±0.12% F.S. (<20% F.S.)
Repeatability ±0.25% of S.P.
Max Pressure 150 psi
Operating Temperature 0 - 65°C
Measure/Control Measure & Control (Controller)
Seal Option Elastomer
Max Temperature 65 celsius
Connectivity EtherNet/IP
Filename
File Type
Documents by Language
Data Sheet - AMF Series
PDF
Installation & Operation Manual - AMF Series
PDF
EtherNet/IP Supplemental Manual - AMF Series
PDF
Embedded Web-based Interface Supplemental Manual - AMF Series
PDF

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: AMF-C-7-S-1B-A

Model
Body Size Communication I/O Enclosure Mechanical Connection Revision Level
AMF C 7 (EtherNet/IP™) S (Standard IP40) 1B (1/4" Tube Compression) A