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Products Semiconductor Products High & Ultra-High Purity Gas Mass Flow Controllers & Meters GF100 Series
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GF100 Series Metal Sealed Thermal Mass Flow Controllers & Meters

High purity flow path. Outstanding performance, reliability, and repeatability.
Models GF100 / GF101 / GF120 / GF120XHT / GF120XSD / GF120XSL / GF121 / GF125 / GF126

Questions?

Talk to one of our application engineering experts by calling: 1-888-554-3569


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Features

  • Long-term zero stability of <±0.5% full scale per year
  • Settling times: 300 ms - <700 ms or 700 ms - <1 second
  • Full-scale flow rates up to 300 slpm
  • All-metal seal flow path: option for 5µ or 10µ inch Ra surface finish
  • Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures 
  • MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
  • Local display
  • Optional SDS gas delivery
  • DeviceNetTM, RS-485 L-Protocol and analogue interfaces

Benefits

  • High-performance components marathon tested to seven times semiconductor industry standards for reliability
  • All metal, corrosion resistant flow path with reduced surface area and unswept volumes ensures faster dry-down during purge steps
  • With MultiFloTM, new process gases and/or ranges can be set in under 60 seconds – no more removing and calibrating MFCs
  • Highly configurable platform enables drop-in replacement and upgrade of most brands of metal sealed MFCs, including the former Celerity, Mykrolis, Tylan and UNIT brands
  • Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
  • GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes
  • GF120xHT high-temperature mass flow controller can withstand operating environments of up to 150°C

Applications

  • Semiconductor etch tools
  • Thin-film chemical vapour deposition systems (CVD, MOCVD, PECVD, ALD)
  • Physical vapour deposition (PVD) systems
  • Epitaxial process systems
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Product Type

Mass Flow Controller

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Differentiator

High Purity/Ultra-High Purity

Standard GF Series

High Flow GF Series

Ultra-Fast Response Time

Pressure Transient Insensitivity

{0F724D3A-A6AF-4AE4-850F-7CB7D98ABC8A}
Performance
{DD04D52B-F1CB-49CB-8C3C-6DD4DCCE8F47}
Flow Range (Full Scale Capacity)

Standard GF Series: 3 sccm - 55 slpm

High Flow GF Series: 55 slpm - 300 slpm

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Accuracy

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

{3A51093B-CA51-41BB-881F-3F228AB4B9AC}
Repeatability
< ±0.15% S.P.
{9642EE73-6469-41B0-9635-D0FC77DE416C}
Linearity

±0.5% F.S. (included in accuracy)

{F6EAA9AA-9EFA-499A-87B8-41E6B509AF51}
Response Time

Normally Closed Valve:

300 ms - < 700 ms

700 ms - < 1 sec

SDS Gas Delivery: < 3 sec

High-Temperature Model: < 1 sec

{02AA87A4-3B1E-4F25-B7D0-105C6C9F9FD1}
Response Time

Normally Open Valve: <1.5 sec (specific models)

{05574362-0330-4B02-B820-5123105D6513}
Multi-Gas & Range Configurability
MultiFlo™ Standard (most models)
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Pressure Transient Insensitivity

<5% S.P. for up to 5 psi/sec upstream press. spike

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Control Range

Standard GF Series: < 3-100%

High Flow GF Series: 5-100%

{9C3AA3E1-C5FC-48E8-B36A-C195F8F606DD}
Number of Bins

Standard GF Series: 11 bins

High-Flow GF Series: 4 bins

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Valve Shut Down

Standard GF Series: < 1% F.S.

High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out

{11E8DCA4-4E3B-4975-9BE5-EBA91C80801C}
Zero Stability
< ±0.5% F.S. per year
{39961ABF-0D9C-4C4F-B2E5-DD244D234A9F}
Flow Temperature Coefficient

Span: 0.05% S.P. per °C

Zero: 0.005% F.S. per °C

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Mechanical
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Seal Material
Metal
{53181BE2-787E-48EC-8BA0-712085A1CE8C}
Level of Purity / Surface Finish
5 or 10µ inch Ra
{E9DFB78F-5DA5-4974-852B-271C5300CB93}
Wetted Materials

SEMI F20 HP/UHP Compliant

316L VIM/VAR

Hastelloy C-22

316L Stainless Steel

304 Stainless Steel

KM-45

{D991E384-0015-45DF-8B6E-4B3975F9EFE5}
Valve Options

Normally Closed

Normally Open (specific models only)

Meter (no valve)

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Ratings
{00DFAA0D-4DDD-4057-8EC1-F713D0EB0233}
Max Temperature
50oC
{9D73B7BD-D7C3-4C56-B408-FA7D94CD8FED}
Differential Pressure Range

3-860 sccm = 7-45 psid

861-7200 sccm = 10-45 psid

7201-55000 sccm = 15-45 psid

51 slm-300 slm = 30-90 psid

*Typical pressure drops. Contact Brooks Technical Support for more information.

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Max Pressure

Standard GF Series: 500 psia max

High Flow GF Series: 75 psig (controller), 150 psig (meter)

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Leak Integrity
1x10-10 atm cc/sec He
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Diagnostics & Display
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Diagnostic Capability
Available

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Status Lights

MFC Health

Network Status

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Alarms

Control Valve Output

Network Interruption

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Diagnostic / Service Port

RS-485 via 2.5mm jack (all models)

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Display

Top Mount Integrated LCD

Viewing Angle: Fixed

Viewing Distance: 10 feet

Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)

Resolution: 0.1 (unit)

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Electrical
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Analogue Communication

0-5 Vdc

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Digital Communication

DeviceNet™

RS485 L-Protocol

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Electrical Connection

Analog/RS485 via 9-Pin "D" connector

DeviceNet™ via 5-Pin "M12" connector

Various cable adaptors available. See product data sheet for more information.

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Power Supply / Consumption

Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)

DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc

(Under typical operating conditions)

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Compliance
{BD155239-DD6A-4B7D-B9E9-3D97DFA8423B}
EMC

EC Directive 2004/108/EC

CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

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Environmental Compliance

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

GF100 GF101 GF120 GF120XHT GF120XSD GF120XSL GF121 GF125 GF126
Differentiator

High Purity

High Purity

High Flow Rate

 

Ultra-High Purity

Ultra-Fast Response Time

 

High-purity flow path

Outstanding performance and reliability for high temperature applications up to 150°C

Remote electronics offered with DIN rail mounting

SDS Gas Delivery

SDS Gas Delivery

Ultra-High Purity

High Flow Rate

Ultra-High Purity

Ultra-Fast Response Time

Pressure Transient Insensitivity

Ultra-High Purity

High Flow Rate

Pressure Transient Insensitivity
Flow Range (Full Scale Capacity) 3 sccm - 55 slm

55 slm - 300 slm

 3 sccm - 55 slm 50 sccm - 5 slm >25 sccm - 1 slm 4 - 25 sccm

55 slm - 300 slm

 3 sccm - 55 slm

55 slm - 300 slm
Surface Finish 10µ inch Ra 10µ inch Ra 5µ inch Ra 5µ inch Ra 5µ inch Ra 5µ inch Ra 5µ inch Ra 5µ inch Ra 5µ inch Ra
Accuracy

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%
Repeatability < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.

5-100% = ±0.15% S.P.

2-5% = ±0.015% F.S.

< ±0.15% S.P.

< ±0.15% S.P.

 < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.
Response Time

Normally Closed

<1 sec

Normally Closed

<1 sec

Normally Closed

700 ms

Normally Closed

<1 sec

Normally Closed

<3 sec

Normally Closed

<3 sec

Normally Closed

<1 sec

Normally Closed Valve

300ms (3-860 sccm N2 Eq.)

400ms (861-7200 sccm N2 Eq.)

500ms (7201-30000 sccm N2 Eq.)

<700ms (30001-55000 sccm N2 Eq.)

 

Normally Closed Valve

<1 sec

 
Response Time

Normally Open

<1.5 sec

Normally Open

—

Normally Open

<1.5 sec

Normally Open

—

Normally Open

—

Normally Open

—

Normally Open

—

Normally Open Valve

<1.5 sec

Normally Open Valve

—
Multi-Gas & Range Configurability MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard — — — MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard
Pressure Transient Insensitivity — — — — — — —

±5% S.P. up to 5 psi/sec upstream press. spike

Ability to measure inlet pressure
Diagnostic Capability

Status Lights: MFC Health & Network Status

Alarms: Control Valve Output & Network Interruption

Status Lights: MFC Health & Network Status

Alarms: Control Valve Output & Network Interruption

Status Lights: MFC Health & Network Status

Alarms: Control Valve Output & Network Interruption

Status Lights: MFC Health & Network Status

Alarms: Control Valve Output & Network Interruption

Status Lights: MFC Health & Network Status

Alarms: Control Valve Output & Network Interruption

Status Lights: MFC Health & Network Status

Alarms: Control Valve Output & Network Interruption

Status Lights: MFC Health & Network Status

Alarms: Control Valve Output & Network Interruption

Status Lights - MFC Health, Network Status

Alarms - Control Valve Output, Network Interruption

Status Lights: MFC Health & Network Status

Alarms: Control Valve Output & Network Interruption
Analogue Communication

0-5 Vdc

0-5 Vdc

0-5 Vdc

0-5 Vdc

0-5 Vdc

0-5 Vdc

0-5 Vdc

0-5 Vdc

0-5 Vdc
Digital Communication

RS485 L Protocol

DeviceNet™

 

RS485 L Protocol

DeviceNet™

 

RS485 L Protocol

DeviceNet™

 

RS485 L Protocol

DeviceNet™

 

RS485 L Protocol

DeviceNet™

 

RS485 L Protocol

DeviceNet™

 

RS485 L Protocol

DeviceNet™

 

RS485 L Protocol

DeviceNet™

RS485 L Protocol

DeviceNet™

 
Filename File Type Documents By Language
Data Sheet GF100 pdf English
Data Sheet GF120xHT pdf English
Installation & Operation Manual pdf English
DeviceNet™ Supplemental Manual pdf English
RS485 L-Protocol Supplemental Manual pdf English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: GF100 - AS - G1

Meter Series
Fitting
Connector
 GF1xx AS - 1-1/2” body width, 92 mm 0.440” large bore C Seal (only for bins SH45-SH50)
 BX - Cable adapter to 15 pin D Brooks (Unit “B”,”N”) adapts G1 base
  CX - 1-1/8” body width, 92 mm C Seal
 *DX - DeviceNet™ 5 pin micro
  VX - 1-1/2” body width, 124mm 1/4” VCR male
 EX - Cable adapter to Card Edge (w/o VTP), RS485 through RJ11 jacks (Unit”E”; IN “L”, “R”) adapts GX base
  WX - 1-1/8” body width, 92mm W Seal
 GX - 9-Pin D with RS485 (Unit”G”); display and overlay 180 degree orientation
    G1 - 9-Pin D with RS485 (Unit”G”)
    SX - 9 pin D with STEC pin-out (w/VTP) (Unit”S”,”Q”)
Filename File Type
GF100-GF120-GF125-AS-DX DXF
GF100-GF120-GF125-AS-G1 STEP
GF100-GF120-GF125-AS-SX DXF
GF100-GF120-GF125-AX-DX DXF
GF100-GF120-GF125-AX-G1 IGS
GF100-GF120-GF125-CX-DX STEP
GF100-GF120-GF125-CX-GX STEP
GF100-GF120-GF125-CX-SX DXF
GF100-GF120-GF125-CX-TX DXF
GF100-GF120-GF125-DX-DX DXF
GF100-GF120-GF125-DX-TX DXF
GF100-GF120-GF125-EX-SX DXF
GF100-GF120-GF125-LX-DX STEP
GF100-GF120-GF125-LX-GX STEP
GF100-GF120-GF125-VS-G1 DXF
GF100-GF120-GF125-VS-GX STEP
GF100-GF120-GF125-VS-SX STEP
GF100-GF120-GF125-VS-TX DXF
GF100-GF120-GF125-VX-BX STEP
GF100-GF120-GF125-VX-DX STEP
GF100-GF120-GF125-VX-EX STEP
GF100-GF120-GF125-VX-G1 dxf
GF100-GF120-GF125-VX-GX-STEP STEP
GF100-GF120-GF125-VX-KX STEP
GF100-GF120-GF125-VX-SX DXF
GF100-GF120-GF125-WX-DX STEP
GF100-GF120-GF125-WX-GX-STEP STEP
GF100-GF120-GF-125-WX-SX IGS
GF101-GF-121-GF126-C1-DX IGS
GF101-GF121-GF126-V1-D0 DXF
GF101-GF121-GF126-V1-DX IGS
GF101-GF-121-GF126-V1-EX DXF
GF101-GF121-GF126-V1-G1 IGS
GF101-GF121-GF126-V2-DX STEP
GF101-GF121-GF126-V2-G1 DXF
GF101-GF121-GF126-V2-SX DXF
GF120XHT-BX-BX zip
GF120XHT-BX-DX zip
GF120XHT-BX-EX zip
GF120XHT-BX-FX zip
GF120XHT-BX-G1 zip
GF120XHT-BX-GX zip
GF120XHT-BX-HX zip
GF120XHT-BX-IX zip
GF120XHT-BX-JX zip
GF120XHT-BX-KX zip
GF120XHT-BX-QX zip
GF120XHT-BX-SX zip
GF120XHT-BX-UX zip
GF120XHT-CX-BX zip
GF120XHT-CX-DX zip
GF120XHT-CX-EX zip
GF120XHT-CX-FX zip
GF120XHT-CX-G1 zip
GF120XHT-CX-GX zip
GF120XHT-CX-HX zip
GF120XHT-CX-IX zip
GF120XHT-CX-JX zip
GF120XHT-CX-KX zip
GF120XHT-CX-QX zip
GF120XHT-CX-SX zip
GF120XHT-CX-UX zip
GF120XHT-LX-BX zip
GF120XHT-LX-DX zip
GF120XHT-LX-EX zip
GF120XHT-LX-FX zip
GF120XHT-LX-G1 zip
GF120XHT-LX-GX zip
GF120XHT-LX-HX zip
GF120XHT-LX-IX zip
GF120XHT-LX-JX zip
GF120XHT-LX-KX zip
GF120XHT-LX-QX zip
GF120XHT-LX-SX zip
GF120XHT-LX-UX zip
GF120XHT-VS-BX zip
GF120XHT-VS-DX zip
GF120XHT-VS-EX zip
GF120XHT-VS-FX zip
GF120XHT-VS-G1 zip
GF120XHT-VS-GX zip
GF120XHT-VS-HX zip
GF120XHT-VS-IX zip
GF120XHT-VS-JX zip
GF120XHT-VS-KX zip
GF120XHT-VS-QX zip
GF120XHT-VS-SX zip
GF120XHT-VS-UX zip
GF120XHT-VX-DX zip
GF120XHT-VX-EX zip
GF120XHT-VX-FX zip
GF120XHT-VX-G1 zip
GF120XHT-VX-GX zip
GF120XHT-VX-HX zip
GF120XHT-VX-IX zip
GF120XHT-VX-JX zip
GF120XHT-VX-KX zip
GF120XHT-VX-QX zip
GF120XHT-VX-SX zip
GF120XHT-VX-UX zip
GF120XHT-WX-BX zip
GF120XHT-WX-DX zip
GF120XHT-WX-EX zip
GF120XHT-WX-FX zip
GF120XHT-WX-G1 zip
GF120XHT-WX-GX zip
GF120XHT-WX-HX zip
GF120XHT-WX-IX zip
GF120XHT-WX-JX zip
GF120XHT-WX-KX zip
GF120XHT-WX-QX zip
GF120XHT-WX-SX zip
GF120XHT-WX-UX zip
0250 Series
0250 Series
Controls and powers up to 4 devices
MultiFlo™ Configurator
MultiFlo™ Configurator
A comprehensive gas database enabling you to configure your MultiFlo™ capable MFC for thousands of gas types and ranges without removing it from the gas line.