特長
High Purity/Ultra-High Purity
Standard GF Series
High Flow GF Series
流量範囲（フルスケール容量）
Standard GF Series: 3 sccm - 55 slm
High Flow GF Series: 55 slm - 300 slm
精度
±1% S.P. > 35-100%
±0.35% F.S. 2-35%
Repeatability
< ±0.15% S.P.
Linearity
±0.5% F.S. (included in accuracy)
Response Time - NC
Normally Closed Valve: 700 ms - < 1 sec
SDS Gas Delivery: < 3 sec
Response Time - NO
Normally Open Valve: <1.5 sec (specific models)
Multi-Gas Multi-Range
MultiFlo™ Standard (most models)
Control Range
Standard GF Series: < 3-100%
High Flow GF Series: 5-100%
Number of Bins
Standard GF Series: 11 bins
High-Flow GF Series: 4 bins
Valve Shut Down
Standard GF Series: < 1% F.S.
High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out
Zero Stability
< ±0.5% F.S. per year
Temperature Coefficient
Span: 0.05% S.P. per °C
Zero: 0.005% F.S. per °C
Level of Purity
4 - 10µ inch Ra
Wetted Materials
SEMI F20 HP/UHP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel
KM-45
Valves
Normally Closed
Normally Open (specific models only)
Meter (no valve)
Differential Pressure Range
3-860 sccm = 7-45 psid
861-7200 sccm = 10-45 psid
7201-55000 sccm = 15-45 psid
51 slm-300 slm = 30-90 psid
*Typical pressure drops. Contact Brooks Technical Support for more information.
最大圧力
Standard GF Series: 500 psia max
High Flow GF Series: 75 psig (controller), 150 psig (meter)
Leak Integrity
1x10-10 atm cc/sec He
Status Lights
MFC Health
Network Status
Alarms
Control Valve Output
Network Interruption
Diagnostic - Service Port
RS-485 via 2.5mm jack (all models)
Display
Top Mount Integrated LCD
Viewing Angle: Fixed
Viewing Distance: 10 feet
Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)
Resolution: 0.1 (unit)
デジタル通信
DeviceNet™
RS485 L-Protocol
Electrical Connection
Analog/RS485 via 9-Pin "D" connector
DeviceNet™ via 5-Pin "M12" connector
Various cable adaptors available. See product data sheet for more information.
Power Supply - Consumption
Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)
DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc
(Under typical operating conditions)
電磁環境適合性
EC Directive 2004/108/EC
CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
環境法令遵守
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006