Skip links

The Fastest and Most Accurate MFCs

Enhanced with the Speed of EtherCAT®
Models GF100 / GF101 / GF120 / GF120XSD / GF120XSL / GF121 / GF125 / GF126

Questions?

Talk to one of our application engineering experts by calling: 1-888-554-3569


For pricing information:

Request a Quote
EtherCAT® GF100 Series Flyer

Performance Perfected for Semiconductor Processes

  • Embedded diagnostics leverage real-time EtherCAT® data acquisition capabilities
  • Ultra-stable flow sensor (≤ 0.15% of S.P. drift per year) enables tighter low set point accuracy and reduces maintenance requirements
  • Improved valve shutdown (≤ 0.15% of bin range) reduces valve leak-by to reduce first wafer effects
  • Newly enhanced pressure transient insensitivity reduces crosstalk sensitivity for consistent mass flow delivery

Features

  • Long-term zero stability of <±0.15% full scale per year
  • Settling times: 300 ms - <1 second
  • Full-scale flow rates up to 300 slpm
  • All-metal seal flow path: option for 5µ or 10µ inch Ra surface finish
  • Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures 
  • MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
  • Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
  • GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes

Benefits

  • Exceptional performance
    • Rapid reaction times improve application efficiency
  • Flexible topology
    • Virtually limitless network topology possible
  • Simple and robust
    • Configuration, diagnostics, and maintenance
  • Affordability
    • Standard Ethernet port

Applications

  • Semiconductor etch tools
  • Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
  • Physical vapor deposition (PVD) systems
  • Epitaxial process systems
Product Type

Mass Flow Controller

Differentiator

EtherCAT Communication

High Purity/Ultra-High Purity

Embedded Diagnostics

Ultra-stable Flow Sensor

Improved Valve Shutdown

Performance
Flow Range (Full Scale Capacity)

Standard GF Series: 3 sccm - 55 slm

High Flow GF Series: 55 slm - 300 slm

Accuracy

Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20%

High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35%

Repeatability
< ±0.15% S.P.
Response Time

Normally Closed Valve: 300 ms - < 1 sec

SDS Gas Delivery: < 3 sec

Response Time

Normally Open Valve: <1.5 sec (specific models)

Pressure Transient Insensitivity

Specific models

Multi-Gas & Range Configurability
MultiFlo™ Standard (most models)
Control Range

Standard GF Series:  2-100%

High Flow GF Series: 5-100%

Number of Bins

Standard GF Series: 11 bins

High-Flow GF Series: 4 bins

Valve Shut Down

Standard GF Series: < 0.15% F.S.

High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out

Zero Stability

< ±0.15% F.S. per year

Flow Temperature Coefficient

Span: 0.05% S.P. per °C

Zero: 0.005% F.S. per °C

Mechanical
Seal Material
Metal
Level of Purity / Surface Finish

5 - 10µ inch Ra

Wetted Materials

SEMI F20 HP/UHP Compliant

316L VIM/VAR

Hastelloy C-22

316L Stainless Steel

304 Stainless Steel

KM-45

Valve Options

Normally Closed

Normally Open (specific models only)

Meter (no valve)

Ratings
Max Temperature
50oC
Differential Pressure Range

3-860 sccm = 7-45 psid

861-7200 sccm = 10-45 psid

7201-55000 sccm = 15-45 psid

51 slm-300 slm = 30-90 psid

SDS Models 10 Torr- 30 psid typical

*Typical pressure drops. Contact Brooks Technical Support for more information.

Max Pressure

Standard GF Series: up to 500 psia max

High Flow GF Series: 75 psig (controller), 150 psig (meter)

Leak Integrity
1x10-10 atm cc/sec He
Diagnostics & Display
Diagnostic Capability
Available

Status Lights

Run

Error

Power

Network Status

Alarms

Control Valve Output

Network Interruption

Temperature High/Low

Pressure High/Low

Power Surge/Sag

Diagnostic / Service Port

Micro USB

Display

Top Mount Integrated LCD

Viewing Angle: Fixed

Viewing Distance: 10 feet

Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)

Resolution: 0.1 (unit)

Electrical
Analog Communication

Digital Communication

EtherCAT®

Electrical Connection

Power via 5-pin M8 Connector, EtherCAT via twin RJ45

Power Supply / Consumption

24 Vdc, 7 Watts

(Under typical operating conditions)

GF100

GF101

 

GF120

 

GF120XSD

 

GF120XSL

 

GF121

 

GF125

 

GF126

 

Differentiator

High Purity

High Purity

High Flow Rate

Ultra-High Purity

Ultra-Fast Response Time

SDS Gas Delivery

SDS Gas Delivery

Ultra-High Purity

High Flow Rate

Ultra-High Purity

Ultra-Fast Response

Pressure Transient Insensitivity

High Flow Rate

Flow Range (Full Scale Capacity) 3 sccm - 55 slm

55 slm - 300 slm

3 sccm - 55 slm >25 sccm - 1 slm 4 - 25 sccm

55 slm - 300 slm

3 sccm - 55 slm

55 slm - 300 slm

Surface Finish 10µ inch Ra 10µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra

5µ inch Ra

Accuracy

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

±1% S.P. > 20-100%

±0.20% F.S. 2-20%

±1% S.P. > 35-100%

±0.35% F.S. 2-35%

Repeatability < ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.

< ±0.15% S.P.

< ±0.15% S.P.

< ±0.15% S.P. < ±0.15% S.P. < ±0.15% S.P.
Response Time

Normally Closed

<1 sec

Normally Closed

<1 sec

Normally Closed

700 ms

Normally Closed

<3 sec

Normally Closed

<3 sec

Normally Closed

<1 sec

Normally Closed

300ms - <700ms

 

Normally Closed

<1 sec

 

Response Time

Normally Open

<1.5 sec

Normally Open

Normally Open

<1.5 sec

Normally Open

Normally Open

Normally Open

Normally Open

<1.5 sec

Normally Open

Multi-Gas & Range Configurability MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard MultiFlo™ Standard
Pressure Transient Insensitivity

±5% S.P. up to 5 psi/sec upstream press. spike

Ability to measure inlet pressure

Diagnostic Capability

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Status Lights & Alarms

Digital Communication

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT

EtherCAT

FilenameFile TypeDocuments By Language
Flyer pdf English
Data Sheet pdf English
Installation & Operation Manual pdf English
EtherCAT® Supplemental Manual - GF1xx pdf English
Controls and powers up to 4 devices
A comprehensive gas database enabling you to configure your MultiFlo™ capable MFC for thousands of gas types and ranges without removing it from the gas line.