Skip To Content
Products Accessories & Software Product Software MultiFlo™ Configurator
Questions? Call 1-888-554-3569

MultiFlo™ Configurator

Overview

MultiFlo™ Configurator software for Windows™ operating systems provides users with a fast and simple method to reprogram the gas and range on GF100 Series, GF40 Series, GF80 Series and Celerity/Unit brand mass flow controllers without removing them from the gas line. 

MultiFlo™ technology is patented by Brooks Instrument and gives process engineers a unique resource: A comprehensive gas database - built on thousands of native gas runs to establish correction functions that account for both thermal and physical differences among gases.

Our easy-to-use MultiFlo™ Configurator application has the most comprehensive gas database in the market delivering improved process gas accuracy, enabling you to use our MultiFlo™-capable MFCs across the widest range of applications.

 

If you are a new MultiFlo™ and FloCom database user, please download the most recent version of each software package. If your MFC has an older version of the MultiFlo™ software or FloCom database already installed on it, you must first uninstall it, then install the latest version of the MultiFlo™ Configurator and/or FloCom database.

Please be aware that each new version of the MultiFlo™ Configurator and the FloCom database has changes that may have copy exact implications for the GF100 Series and Celerity/Unit brand devices. If your company follows copy exact procedures it is recommended to continue using the current approved version until these changes are approved. Please do not update the database software unless you update to the most recent version of the MultiFlo™ Configurator.

Drivers

Most times drivers are automatically installed when installing the MultiFlo Configurator. However, there are a few occasions when they are not.  If you experience this, download the correct driver below.

If you have any questions about the MultiFlo™ Configurator and/or FloCom database, please contact Technical Services or your local Brooks Instrument representative for assistance.

Documentation

Filename File Type Documents By Language
Quick Start Guide pdf English
FloCom Database db220418 - GF40 Gas Listing xls English
FloCom Database db220418 - GF1XX Gas Listing xls English

Versions

MultiFlo™ Configurator Driver for GF100 EtherCAT MFCs

For GF100 EtherCAT MFCs, a micro-usb diagnostic cable is used to communicate with the device using Multiflo Configurator.  Typically, Microsoft Windows will load the driver automatically.  If this is not the case, download and install this driver.  You will need to install the driver, plug in the micro-usb cable and then launch the software.
Login To Download

MultiFlo™ Configurator Driver for Devices Using USB 2.5mm Cable

Products using the USB to 2.5mm diagnostic cable (778Z010ZZZ) also require a driver to be installed.  Typically, Microsoft Windows will load the driver automatically. If this is not the case, download and install this driver. You will need to install the driver, plug in the USB cable and then launch the software.
Login To Download

MultiFlo™ Configurator V5.34

Version 5.34 includes these new features:

  • Ability to set Mac ID’s greater than 128 and connect via MultiFlo™ to devices that have Mac ID’s up to 239
  • Ability to access DNET settings for PC115/PC125 and label printing fixes for 1.5L vs 2L devices
  • Additional producer and consumer options available, and added data units and data type for DNET configuration options
  • Ability to configure devices that are bins SH51-SH54

Version 5.34 has changes that may have copy exact implications for the GF100 Series and Celerity/Unit brand devices. If your company follows copy exact procedures, it is recommended that you continue using V5.32 until these changes are approved.

Login To Download

MultiFlo™ Configurator V5.32

Version 5.32 includes these new features:

  • New columns for “Gas Model” and “FloCom+ Version” added to the gas detail page
  • GF135 non-configurable devices now able to set page orientation post page creation
  • Firmware 1.28 updated to set dncIdleEventEnable=Enable if selected

Version 5.32 has changes that may have copy exact implications for the GF100 Series and Celerity/Unit brand devices. If your company follows copy exact procedures, it is recommended that you continue using V5.26 until these changes are approved.

Login To Download

MultiFlo™ Configurator FloCom Database db220418

  • The following gases/mixtures have been added to the database: SEMI Gas Codes 124, 193, 205, 265, 304, 323, 328, 376, 401, 403, 404, 558, 588, 623, 631, 687, 1058, 5021, 5024, 5027
  • Added GF40 & GF100 Series SA/SH Bin tables (40-49) to the following gases/mixtures: SEMI Gas Codes 205, 265, 304, 403, 558, 588, 623, 631, 687, 1058, 5021
  • Added GF40 & GF100 Series SA/SH Bin tables (41-49) to the following gases/mixtures: SEMI Gas Codes 124, 323, 328, 376, 401, 404, 5024, 5027
  • Added GF100 Series High Flow SA/SH bins (50-54) to the following gases/mixtures: SEMI Gas Codes 124, 193, 205, 265, 297, 304, 323, 328, 376, 401, 403, 404, 542, 558, 588, 623, 631, 687, 963, 1058, 5021, 5024, 5027
  • Added GF100 Series SH Bin tables (48-54) to the following gases/mixtures: SEMI Gas Codes 147
Login To Download

MultiFlo™ Configurator FloCom Database db190701

Featuring:

  • The following gases/mixtures have been added to the database: SEMI Gas Codes 267, 1053, 1054, 1055
  • Added GF40 & GF100 Series SA/SH Bin tables (40-54) to the following gases/mixtures: SEMI Gas Codes 251, 267, 1053, 1054, 1055
  • Added GF100 Series High Flow SA/SH bins (49-54) to the following gases/mixtures: SEMI Gas Codes 22, 23, 589
Login To Download

MultiFlo™ Configurator FloCom Database db181213

Featuring:

  • The following gases/mixtures have been added to the database: SEMI Gas Codes 723, 817, 955, 1050, 1051, 1052, 5025
  • Added GF40 & GF100 Series SA/SH Bin tables (40-54) to the following gases/mixtures: SEMI Gas Codes 723, 817, 955, 1050, 1051, 1052, 5025
  • Added GF100 Series High Flow SA/SH bins (49-54) to the following gases/mixtures: SEMI Gas Codes 100, 701
Login To Download

MultiFlo™ Configurator FloCom Database db180326

Featuring:

  • The following gases/mixtures have been added to the database: SEMI Gas Codes 131, 149, 213, 310, 397, 580, 1049
  • Added GF40 & GF100 Series SA/SH Bin tables (40-54) to the following gases/mixtures: SEMI Gas Codes 131, 149, 213, 310, 397, 580, 1049
  • Added GF100 Series High Flow SA/SH bins (49-54) to the following gases/mixtures: SEMI Gas Codes 25, 27, 31, 42, 48, 69, 99, 190, 1049
Login To Download

MultiFlo™ Configurator FloCom Database db170725

Featuring:

  • The following gases/mixtures have been added to the database: SEMI Gas Codes 266, 393, 556, 561, 562, 564, 566, 567, 568, 569, 629, 661, 669, 720, 746, 754, 755, 756, 757, 758, 759, 760, 761, 1048
  • Added GF40 & GF100 Series SA/SH Bin tables (40-54) to the following gases/mixtures: SEMI Gas Codes 266, 393, 556, 561, 562, 564, 566, 567, 568, 569, 629, 630, 641, 720, 746, 754, 755, 756, 757, 758, 759, 760, 761, 1048
  • Added GF100 Series High Flow SA/SH bins (49-54) to the following gases/mixtures: SEMI Gas Code 607
Login To Download

MultiFlo™ Configurator FloCom Database db170131

Now includes:

  • Added the following gases/mixtures to the database: SEMI Gas Codes 619, 768, 789, 1026, 1027, 1041, 1042, 1043, 1044
  • The following gases/mixtures were added to the SA/SH Bin tables (40-54): SEMI Gas Codes 136, 176, 503, 504, 505, 507, 508, 510, 511, 512, 515, 518, 519, 520, 521, 522, 530, 531, 533, 534, 539, 540, 541, 543, 545, 548, 619, 725, 768, 789, 1026, 1027, 1041, 1042, 1043, 1044
  • Added SA/SH high-flow bins (50-54) to the following gases/mixtures: SEMI Gas Codes 4, 11, 28, 39, 596 (SH49-54), 694, 1036 (SH bins only)
  • Added SA/SH high-flow bins (51-54) to the following gases/mixtures: SEMI Gas Codes 513, 822, 1028, 1029, 1030, 1031, 1032, 1033, 1034, 1035, 1037, 1038, 1039
Login To Download

MultiFlo™ Configurator FloCom Database db160713

Now includes:

  • 13 new gases added to SA/SH bin tables
    • SEMI Gas Codes: 822, 1028, 1029, 1030, 1031, 1032, 1033, 1034, 1035, 1036, 1037, 1038, 1039
  • Added to the Neon (SEMI Gas Code: 2) bin table
    • SA bins: 48, 50, 51, 52, 53, 54
    • SH bins: 48, 49, 50, 51, 52, 53, 54
Login To Download

MultiFlo™ Configurator FloCom Database db160127

Now includes:

  • Three new gases added to SA/SH bin tables
  • SEMI Gas Codes: 730, 1024, 1025
Login To Download

MultiFlo™ Configurator FloCom Database db150916

Now includes:

  • Extended bin table range for two gases: SH/SA 51-54 (see support files for more details).
  • SEMI Gas Codes: 28, 53
Login To Download

MultiFlo™ Configurator FloCom Database db141110

Now includes:

  • Four new gases added to the SA/SH bin tables
  • SEMI Gas Codes: 26, 387, 583, 709
  • Added gas support for SEMI Gas Code 722 (5%B2H6/H2). Customer Special Request (CSR) recommended for all B2H6 gas mixtures.
Login To Download

MultiFlo™ Configurator FloCom Database db140824

Now includes:

  • 11 new gases added to the SA/SH bin tables
  • SEMI Gas Codes: 123, 514, 675, 1006, 1007, 1008, 1009, 1010, 1011, 1012, 1013
Login To Download

MultiFlo™ Configurator FloCom Database db140602

Now includes:

  • 7 new gases added to the SA/SH bin tables: SEMI gas codes 73, 360, 385, 907, 1003, 1004, 1005
  • Added gas support for GF135 for SEMI gas code 70
  • Added SDS gas support for SEMI gas code 324
Login To Download

MultiFlo™ Configurator FloCom Database db140128

Now includes:

  • Nine new gases: SEMI Gas Codes 30, 79, 102, 113, 249, 627, 1000, 1001, 1002
  • Releasing high flow bins (SH51-54 and SA51-54) for Air and NO
  • Added gas support for GF135 for N2O CHF4 SiH2Cl2.
Login To Download

MultiFlo™ Configurator FloCom Database db131013

Login To Download

MultiFlo™ Configurator FloCom Database db13064

Now includes:

  • 98 new gases
Login To Download