Fastest, Most Accurate MFCs with EtherCAT

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Get the Fastest and Most Accurate MFCs

Enhanced with the Speed of EtherCAT®

Full-scale flow ranges from three standard cubic centimeters per minute (sccm) to 300 standard liters per minute (slm)
Embedded diagnostics leverage real-time EtherCAT® data acquisition capabilities
Ultra-stable flow sensor (≤ 0.15% of S.P. drift per year) enables tighter low set point accuracy and reduces maintenance requirements

Improved valve shutdown (≤ 0.15% of bin range) reduces valve leak-by to reduce first wafer effects
Newly enhanced pressure-transient insensitivity reduces crosstalk sensitivity for consistent mass flow delivery

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