Skip links

HOLIDAY HOURS: Our facilities in the USA will be closed on Thursday, November 26 and Friday, November 27 in observance of Thanksgiving. We will resume normal business hours on Monday, November 30.

Skip To Content

Get the Fastest and Most Accurate MFCs

Enhanced with the Speed of EtherCAT®

Design-in the Performance Your Next Generation Process Needs

  • Full-scale flow ranges from three standard cubic centimeters per minute (sccm) to 300 standard liters per minute (slm)
  • Embedded diagnostics leverage real-time EtherCAT® data acquisition capabilities
  • Ultra-stable flow sensor (≤ 0.15% of S.P. drift per year) enables tighter low set point accuracy and reduces maintenance requirements
  • Improved valve shutdown (≤ 0.15% of bin range) reduces valve leak-by to reduce first wafer effects
  • Newly enhanced pressure-transient insensitivity reduces crosstalk sensitivity for consistent mass flow delivery
  • Visit the product page for more information. Learn More

Comparing Key
Performance Criteria

of EtherCAT®, DeviceNet, and RS-485

Download the
Comparison Guide

EtherCAT® Data
Acquisition Benefits

Download White Paper

Questions about EtherCAT?

Talk to one of our application engineering experts.

Contact Us

Request a Quote