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HOLIDAY HOURS: All Brooks Instrument facilities in the USA will be closed July 3rd and 4th in observance of Independence Day. We will resume normal business hours on Wednesday, July 5th.


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Semiconductor Products

Ultra-high purity products for advanced semiconductor processes.

Service & Support

Get Factory Certified Service or field support to calibrate and repair your instrument.


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SLA5800 Series Elastomer Sealed MFC with EtherCAT

VIDEO: How to Install BEST Software & Connect to a Device

Are you a user of SLA Series mass flow controllers and pressure controllers? Then maximize the full potential of these devices with the Brooks Expert Support Tool (BEST) software. The Windows-based free download enables servicing tasks that include: Setup, attribute configuration, diagnostics, troubleshooting and valve tuning. With the purchase of a license key, in-situ verification or recalibration is enabled via the service port accessible on top of the device. This tutorial demonstrates how easy it is to install the software and connect to a device.

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semicon west 2016

Visit us at Semicon West: July 11-13, 2017, Booth #7723, San Francisco - CA

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