Designing your next generation tools? Demo Brooks' MFCs - now with EtherCAT®
Discover how the industry’s fastest, most accurate Mass Flow Controllers – enhanced with the speed of EtherCAT® – will give your next-generation tool a competitive edge. From thin-film tools such as CVD, MOCVD and ALD, to etch tools and epitaxial process systems, leading semiconductor tool OEMs are leveraging EtherCAT’s real-time information capabilities and rapid reaction times. Would the GF100 Series MFCs with EtherCAT® enhance your tool’s performance? Click Learn More to request a free demo unit to test its capabilities.