MODELS: 5866RT
5866RT Elastomer Sealed Pressure Controller & Flow Meter
Versatility for high pressure applications across a wide flow measurement range.
The Brooks model 5866RT metal or elastomer sealed pressure controller and flow meter controls pressure while also measuring flow rate. Model 5866RT receives a remote pressure transducer signal, and using adjustable integral PID control electronics and control valve, will maintain a desired set pressure. With options in seals, electro-polished wetted surfaces and a wide pressure and flow measurement range, 5866RT delivers proven results across a broad range of processes.
Features
- Integral pressure transducer
- Response time: <0.8 seconds
- Wide flow measurement range with full-scale flow rates from 0 - 3 sccm to 0 – 30,000 sccm
- Wide range of full scale pressures (Max pressure 1500 psig)
- Optional metal seal available
- Electro-polished wetted surfaces (optional)
- Electrically activated valve override
- Suitable for upstream or downstream control
- Analog interface
Applications
- Thin-film processes
- Chemical research
- Petrochemical research
- Laboratory
- Fuel cell
- Life science
Benefits
- Eliminates droop, hysteresis and boost
- High leak integrity
- More control over pressure and flow
- Dynamic tuning adjustments with top mounted DIP switches
| Flow Measuring Principle | Pressured-based (P-MFC) |
|---|---|
| Technology Principle | Pressure Control |
| Measure/Control | Measure & Control (Controller) |
| Max Flow | 30000 sccm |
| Max Pressure | 1500 psi |
| Pressure Control Range | 100:1 |
| Max Operating Pressure | 103 bar |
| Max Temperature | 65 celsius |
| Seal Option | Elastomer, Metal |
| Accuracy | ±1% F.S. including linearity at the calibration conditions | ±1.5% F.S. for flow rates greater than 20 slpm |
| Connectivity | Analog (0–5 V) |
| Repeatability | ±0.25% of rate |
| Flow Range | 0.003 to 30 slpm |
| Type of Media | Pressure |
| Operating Temperature | 0°C - 65°C |