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  1. 5700 Series Elastomer Sealed Mass Flow Meters

    5700 Series elastomer sealed mass flow meters offer a reliable, economical gas flow meter for purge gas, process analysis and analytical flow measurement.

  2. 5850E & i Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

    5850E & i Series elastomer sealed mass flow controllers and meters from Brooks deliver the long-term stability and accuracy demanded in manufacturing.

  3. GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters

    GF80 Series metal sealed mass flow controllers and meters deliver flexible, cost-effective, multi-gas/multi-range flow measurement and control.

  4. GF100 Series Metal Sealed Thermal Mass Flow Controllers & Meters

    GF100 Series metal sealed mass flow controllers and meters from Brooks set the global standard for accuracy, productivity, gas flow purity and flexibility.

  5. 5850EM Series Metal Sealed Thermal Mass Flow Controllers

    5850EM Series mass flow controllers from Brooks deliver long-term stability plus outstanding leak integrity and gas purity for high-pressure applications.

  6. GF125 Series Metal Sealed Thermal Mass Flow Controllers & Meters

    GF125 Series metal sealed mass flow controllers set the global standard for response times, gas flow purity, and flexibility with MultiFlo™ technology.

  7. GF135 Series Real-Time Flow Error Detection Metal Sealed Thermal Mass Flow Controllers

    The GF135 pressure transient insensitive mass flow controller uses advanced Brooks technology to test and control process flow accuracy in real time..

  8. The Fastest and Most Accurate MFCs

    GF100 Series metal sealed mass flow controllers and meters with the EtherCAT interface from Brooks Instrument raise the global standard for accuracy, valve leak-by, pressure transient insensitivity and real-time data acquisition capabilities.

  9. Quantim® Series Coriolis Mass Flow Controllers & Meters

    Superior accuracy for ultra-low-flow gas and liquid measurement and control with Quantim® Coriolis mass flow controllers and meters from Brooks Instrument.

  10. 9861 Series High Temperature Mass Flow Controllers & Meters

    9861 Series mass flow controllers and meters from Brooks Instrument for challenging high temperature delivery of condensable precursors and dopants.