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  1. 3000 Series Polycarbonate Tube Variable Area Flow Meters

    Cost-effective 3000 Series polycarbonate VA flow meters from Brooks deliver accurate, easy-to-read flow measurement for panel-mounted applications.

  2. Sho-Rate™ Series Glass Tube Variable Area Flow Meters

    Sho-Rate glass tube VA flow meters from Brooks withstand high pressures and corrosive materials for industry-leading repeatability and reliability

  3. SLAMf Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

    The SLAMf Series elastomer sealed mass flow controllers and meters deliver reliable, repeatable flow control in harsh production conditions.

  4. 4800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

    4800 Series elastomer sealed mass flow controllers and meters from Brooks offer fast response times for many common gases and comes in a compact size.

  5. GF125 Series Metal Sealed Thermal Mass Flow Controllers & Meters

    GF125 Series metal sealed mass flow controllers set the global standard for response times, gas flow purity, and flexibility with MultiFlo™ technology.

  6. The Fastest and Most Accurate MFCs

    GF100 Series metal sealed mass flow controllers and meters with the EtherCAT interface from Brooks Instrument raise the global standard for accuracy, valve leak-by, pressure transient insensitivity and real-time data acquisition capabilities.

  7. 5850EM Series Metal Sealed Thermal Mass Flow Controllers

    5850EM Series mass flow controllers from Brooks deliver long-term stability plus outstanding leak integrity and gas purity for high-pressure applications.

  8. GF100 Series Metal Sealed Thermal Mass Flow Controllers & Meters

    GF100 Series metal sealed mass flow controllers and meters from Brooks set the global standard for accuracy, productivity, gas flow purity and flexibility.

  9. GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters

    GF80 Series metal sealed mass flow controllers and meters deliver flexible, cost-effective, multi-gas/multi-range flow measurement and control.

  10. GF100 Series Metal Sealed Thermal Mass Flow Controllers & Meters

    The GF100 high-purity and ultra-high purity mass flow controllers provide a corrosion-resistant flow path with reduced surface area during purge steps.