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Search Results (19 total)

Showing results for GF120

All (19) Downloads (6) Products (5) Resources (5) Software (0) Service & Support (0)

  1. Precise Control of Gas Delivery for Liquid and Solid Precursors

    The gas delivery of liquid and solid precursors is critical to wafer performance, uniformity, and yield as the semiconductor industry embarks on leading edge technology nodes.

    https://brooksinstrument.com/en/blog/controlled-gas-delivery-liquid-solid-precursors

  2. Fastest, Most Accurate MFCs with EtherCAT

    https://brooksinstrument.com/en/ethercat

  3. Fastest, Most Accurate MFCs with EtherCAT

    https://brooksinstrument.com/en/ethernet

  4. Brooks Instrument Acquires Creative Machining Technology

    Acquisition strengthens the company’s ability to produce ultrahigh-purity components for critical markets like semiconductor manufacturing

    https://brooksinstrument.com/en/about-us/news/2024/brooks-instrument-acquires-creative-machining-technology

  5. Compliance & Trade Information

    Export Control Classification Number (ECCN), Harmonized Tariff Schedule (HTS) and origin for Brooks Instrument products may be required for shipping, records and reporting.

    https://brooksinstrument.com/en/about-us/compliance

  6. GF100 Series Metal Sealed Mass Flow Controller - Operating Manual GF100 Series MFCs with DeviceNet™ I/O -Supplemental Manual1.5MB PDF

    Object Set-up and Configuration for GF100, GF101, GF120, GF125, GF135 Series Mass Flow Controllers with DeviceNet™ I/O.

  7. GF100 Series MFCs with RS485 L-Protocol I/O -Supplemental Manual647.2KB PDF

    Object Set-up and Configuration for GF100, GF101, GF120, GF125, GF135 Series Mass Flow Controllers with RS485 L-Protocol I/O.

  8. GF100 Series MFCs with EtherCAT® I/O - Supplemental Manual 1.2MB PDF

    Object Set-up and Configuration for GF100, GF101, GF120, GF121, GF125, GF126 MFCs with EtherCAT® I/O.

  9. GF100 Series Metal Sealed Mass Flow Controller - Operating Manual6.5MB PDF

    GF100, GF101, GF120, GF121, GF125, GF126, GF135 Series MFCs with High or Ultra-high Levels of Purity – Installation, Operation, Maintenance & Troubleshooting, Warranty Information & Product Description Code.

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