The 5866RT metal sealed pressure controller & flow meter from Brooks combines accuracy with a high-integrity metal seal to prevent flow contamination.
MT3750 Series metal tube VA flow meters from Brooks Instrument feature a rugged steel design perfect for hazardous or remote spaces.
The MT3809 Series metal tube variable area flow meters from Brooks Instrument feature rugged design, improved gasket sealing and LCD displays.
FC Series manual flow controllers from Brooks provide a fixed differential pressure across the valve that ensures constant flow when pressures vary.
The Vapor Delivery Module from Brooks Instrument provides a power-efficient design for ultra-high purity water vapor delivery.
The Cartridge III Valve is a multipurpose valve, designed for use with Brooks® purge meters in gas and liquid flow applications.
Brooks' NRS™ (non-rising stem) control valves are designed specifically for extremely low-flow gas and liquid applications.
Elastomer sealed thermal mass flow controllers and meters deliver accurate, cost-effective and long-lasting flow control and measurement technology.
The SLA5800 Series elastomer sealed mass flow controllers deliver stable, precise and ultra-accurate thermal mass flow control and measurement.
The GF40 Series elastomer sealed mass flow controllers and meters feature exclusive MultiFlo technology to maximize process tool productivity.