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VDM300 DI Water Vapor Delivery Module

Highest flow accuracy for ultra-high purity deionized (DI) water vapor delivery.
Models VDM300

The Vapor Delivery Module (VDM) from Brooks Instrument is a high-performance, self-contained module for the highly accurate delivery of ultra-high purity deionized (DI) water vapor. It features a power efficient design that enables low temperature, ultra-high purity vapor generation. It utilizes a proven vapor delivery technique and combines it with advanced digital control and integrated diagnostic features in a small, convenient package.

Designed for advanced strip and post metal etch passivation processes, the VDM delivers improved accuracy, higher flow rates, wider control range and lower power consumption compared to flash evaporation systems. Based on proven thermal mass flow measurement techniques, the VDM produces vapor in a non-super-heated vapor state, reducing the aggressive effects of deionized water, for improved reliability and cleaner operation.

The VDM offers user-friendly data logging and diagnostic features via an independent service port and an intuitive graphic user interface.


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VDM300 Data Sheet


  • Flow range: 3 slpm (DIW vapor)
  • Direct water vapor measurement with superior flow accuracy
  • Connects directly to the house deionized water supply
  • Operates at lower temperatures (non-superheated state)
  • Optimized design for flushing and draining
  • EtherCAT digital communications
  • Brooks Expert Support Tool (BEST) graphical user interface


  • Utilizes proven, reliable thermal mass flow measurement and control technique
  • Highly tolerant of varying fab DI water supply pressure
  • Improved corrosion resistance in wetted path
  • Ensures cleaner operation
  • Tool interface using analog or digital communications
  • Direct user interface for enhanced data collection or troubleshooting


  • Silicon semiconductor post-metal etch process
  • Silicon semiconductor metal strip process
  • Ultra-high purity humidification in sub-atmospheric environments
Product Type

DI Water Vapor Delivery Module



Ultra High Purity DIW Vapor

Highest Flow Accuracy

Compact Design

EtherCAT interface

Vaporization Method
Vapor Draw
Fluid Type
UHP DI Water
Flow Range (Full Scale Capacity)

3000 sccm

Turndown Ratio
Response Time

<2 sec


±1% SP @ >10% FS

±0.2% FS @ 5 - 10% FS

±0.5% of FS
<±0.2% FS
Flow Temperature Coefficient
0.05% per °C zero and span
Valve Shut Down

Normally Closed Valve: <0.5% FS

Analog Communication

0 to 5-24 Vdc

Digital Communication

EtherCAT via dual RJ-45 jacks

Diagnostic (RS485) via  microUSB

Electrical Connection

208-230 Vac, 50/60 Hz, 290 Watts Nominal (tank heater)

± 15 Vdc, ± 5% @ 1.2 amp (MFC heater and PCBA)

Status Lights


Device Ready

Warm Up

Device Fault

ECAT Error

EtherCAT Run

EtherCAT Link Active

Diagnostic / Service Port

RS-485 via microUSB


Outlet Vapor: 1/2" Female VCR

Inlet DI Water: 1/4" Male VCR or Tube Compression

DI Water Drain: 1/8" Instant Tube Fitting

Mounting Orientation
Vertical with DIW inlet fittings down
Max Pressure

Vapor Outlet: 200 torr

Supply Pressure

DI Water: 10 - 40 psig

N2 Purge: 10 - 40 psig

Ambient Temperature Range
15 - 45°C
Internal Volume
0 to 95% RH, non-condensing
Electromagnetic Compatibility (EMC): Fully Compliant to Directive 2004/108/EC (EN: 61326-1:2013)

Low Voltage Directive (LVD): Fully Compliant to Directive 2006/95/EC (EN: 61010-1:2010)

Environmental Compliance

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

SEMI E54.20-1108: Standard for Sensor/Actuator Network Communication for EtherCAT®

Flow Range (Full Scale Capacity)

3000 sccm (DIW Vapor)

Power Input 208-230 Vac, 50/60 Hz, 290 Watts nominal

±1% SP @ >10% FS

±0.2% FS @ 5 - 10% FS

Control Range 20:1
Supply Pressure 10 - 40 psig
Linearity <0.5% of FS
Max Pressure 200 torr
Mounting Orientation Vertical (inlet down)
Repeatability <±0.2% FS
Response Time

<2 sec

Analog Communication

0 to 5-24 Vdc

Digital Communication

EtherCAT via dual RJ-45 jacks

Diagnostics (RS-485) via microUSB

Filename File Type Documents By Language
VDM300-At-a-Glance pdf English Chinese
Data Sheet pdf English Japanese
Installation & Operation Manual pdf English
EtherCAT® Supplemental Manual - VDM300 pdf English
CE EU Declaration of Conformity Certificate pdf English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: VDM3 - 1

  Inlet Fitting
  1 - 1/4” VCR Male
    2 - 1/4” Tube Compression


Filename File Type
Brooks Expert Support Tool (BEST)
A Windows™ based application providing expanded control of Brooks Instrument MFCs and Pressure Controllers.