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GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters

Raises the standard in performance for value-driven metal sealed applications.
Models GF80 / GF81
For many industrial and semiconductor processes, both performance and cost efficiency are crucial. The GF80 Series metal sealed mass flow controllers and meters deliver both: Engineered using the same fast response sensor and patented 4th generation MultiFlo™ technology as our best-selling GF100 series, it’s the right choice for operations that need high performance at a value price point. Moving to a metal sealed MFC brings the full benefit of MultiFloTM multi-gas/multi-range capability since there are no limitations in gases that can be used, enhanced purity of the gas due to elimination of oxygen permeation through elastomers, and a reduction in maintenance since metal seals will last indefinitely.

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GF80 Series Data Sheet

Features

  • Long-term zero stability of <±0.5% full scale per year
  • <1 second settling times
  • Full-scale flow rates up to 300 slpm
  • All-metal seal flow path - 16µ inch Ra surface finish
  • Corrosion-resistant Hastelloy® sensor can operate at lower temperatures for gases prone to thermal decomposition
  • Programmable MultiFloTM capability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
  • Best-in-class temperature coefficient specification through active temperature compensation
  • Embedded self-test routines and independent diagnostic/service port
  • Slimline body with VCR fittings
  • DeviceNetTM, Profibus®, RS-485 and analog interfaces

Benefits

  • Fast <1 second flow settling time eliminates wasted gas and process variability
  • No elastomer seals that can have oxygen permeation, requiring replacement over time
  • MultiFloTM simplifies and streamlines changing process gases — no more removing and calibrating MFCs
  • New gases and/or ranges can be set in under 60 seconds
  • Measurement accuracy not affected by temperature variations
  • Convenient access to diagnostics port for maximum uptime
  • Compact size eases integration into tight machine spaces; excellent choice for retrofits
  • Multi-protocol communication interface simplifies integration into existing systems

Applications

  • Cost efficient retrofit/upgrade of legacy MFCs in refurbished semiconductor process tools
  • Reduce MFC inventory in six-inch/eight-inch semiconductor fabs
  • MOCVD for LED and power device manufacturing
  • Solar/thin film chemical vapor deposition (CVD) systems
  • Analytical OEM equipment
Product Type

Mass Flow Controller

Differentiator
High Purity
Performance
Flow Range (Full Scale Capacity)
3 sccm - 300 slm
Accuracy

±1% S.P. 35-100%

±0.35% F.S. < 5-35%

Repeatability
< ±0.2% S.P.
Linearity

±0.5% F.S. (included in accuracy)

Response Time

Normally Closed Valve: <1 sec

Multi-Gas & Range Configurability
MultiFlo™ Available
Pressure Transient Insensitivity
Control Range

< 5% - 100%

Number of Bins

Standard GF Series: 11 bins

High Flow GF Series: 4 bins

Valve Shut Down

Standard GF Series: < 1% F.S.

High Flow GF Series: < 4% of Standard Configuration F.S. @ 30psig/atm out N2 equiv.

Zero Stability
< ±0.5% F.S. per year
Mechanical
Seal Material
Metal
Level of Purity / Surface Finish
16µ inch Ra
Wetted Materials

316 Stainless Steel

Hastelloy C-22

17-7 PH

430SS

KM-45

Valve Options

Normally Closed

Meter (no valve)

Ratings
Max Temperature
50oC
Differential Pressure Range

3-860 sccm = 7-45 psid

861-7200 sccm = 15-45 psid

7201-50000 sccm = 25-45 psid

51-300 slm = 30-90 psid

(typical pressure drops)

Max Pressure

Standard GF Series: 150 psig (10 bar)

High Flow GF Series: Meter = 75 psig (5 bar), Controller = 150 psig (10 bar)

Leak Integrity
1x10-10 atm cc/sec He
Diagnostics & Display
Diagnostic Capability
Available

Status Lights
MFC Health, Network Status
Alarms

Control Valve Output, Network Interruption

Diagnostic / Service Port

RS485 via 2.5mm jack (all models)

 

Electrical
Analog Communication

0-20 mA

4-20 mA

0-5 Vdc

0-10 Vdc

Digital Communication

DeviceNet™ 

Profibus®

RS485 S-Protocol

RS485 L-Protocol

RS485 A-Protocol (GF081)

Electrical Connection

Profibus/Analog via 9-Pin "D" connector

RS485/Analog via 9-Pin"D" connector, 15-Pin "D" connector

DeviceNet™ via 5-Pin "M12" connector

Power Supply / Consumption

Standard GF Series:   RS485 from +12 Vdc to +24 Vdc = 7 Watts max

                                       Profibus from +13.5 Vdc to +27 Vdc = 7 Watts max

                                       DeviceNet™ from +11 Vdc to +25 Vdc = 13.6 Watts max

High Flow GF Series: RS485 from +12 Vdc to +24 Vdc = 3.3 Watts max

                                       Profibus from +13.5 Vdc to +27 Vdc = 3.3 Watts max

                                       DeviceNet™ from +11 Vdc to +25 Vdc = 3.3 Watts max

Compliance
EMC

CE: EN6126: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Environmental Compliance

Safety EN61010-1

RoHS

GF80

 

GF81
Differentiator

High Purity

Low Flow Rate

High Purity

High Flow Rate

Flow Range (Full Scale Capacity) 3 sccm - 55 slm 51 - 300 slm
Surface Finish 16µ inch Ra 16µ inch Ra
Accuracy

±1% S.P. 35-100%

±0.35% F.S. 2-35%

±1% S.P. 35-100%

±0.35% F.S. 5-35%

Repeatability < ± 0.2% S.P.

0.15% S.P.

Response Time

Normally Closed Valve

<1 sec

Normally Closed Valve

<1 sec

Multi-Gas & Range Configurability MultiFlo™ Available

Pressure Transient Insensitivity
Diagnostic Capability

Status Lights: MFC Health, Network Status

Alarms: Control Valve Output, Network Interruption

Status Lights: MFC Health, Network Status

Alarms: Control Valve Output, Network Interruption

Analog Communication

0-20 mA

4-20 mA

0-5 Vdc

0-10 Vdc

0-20 mA

4-20 mA

0-5 Vdc

0-10 Vdc

Digital Communication

Profibus

RS485 S-Protocol

RS485 L-Protocol

DeviceNet™

 

Profibus

RS485 S-Protocol

RS485 L-Protocol

RS485 A-Protocol

DeviceNet™

 

FilenameFile TypeDocuments By Language
Data Sheet pdf English Japanese
Installation & Operation Manual pdf English Japanese
DeviceNet™ Supplemental Manual - GF40, GF80 pdf English
EtherCAT® Supplemental Manual - GF40, GF80 pdf English
RS485 A-Protocol Supplemental Manual - GF40, GF80 pdf English
RS485 L-Protocol Supplemental Manual - GF40, GF80 pdf English
RS485 S-Protocol Supplemental Manual - GF40, GF80 pdf English
CE EU Declaration of Conformity Certificate pdf English
Controls and powers up to 4 devices
Controls and monitors up to 30 devices, powers up to 10 devices.
A comprehensive gas database enabling you to configure your MultiFlo™ capable MFC for thousands of gas types and ranges without removing it from the gas line.

Dynamic Data Exchange software allows user to make bi-directional links between Windows® based applications and Brooks Instrument RS485 S-Protocol devices.