Capacitance Manometers for Critical Process Vacuum Measurement

Achieve exceptional measurement stability and reliability with Brooks Instrument high-performance capacitance manometers. Designed for the most demanding applications, these fully digital manometer gauges operate over a wide dynamic range with extremely good accuracy delivering repeatable readings over a long lifespan.

KEY APPLICATIONS

Semiconductor manufacturing
Thin-film deposition processes – glass, web and optical coatings
Freeze drying perishable materials
Vacuum processing and deposition systems

Select the capacitance manometer that best meets your requirements.

PRODUCTS

	CMC Series	XacTorr® CMX Series
Product Type	Capacitance Manometer	Capacitance Manometer
Differentiator	Unheated	Heated or Unheated Analog or Digital
Pressure Range	10, 20, 50, 100 and 1000 Torr Full Scale	0.1, 1, 2, 10, 20, 100, 1000 Torr mBar & Pascal References Available
Accuracy	Type A = 0.25% of Reading Type B = 0.50% of Reading	CMX0: 0.25% of Reading CMX1, CMX2: 1 to 1000 Torr Ranges = 0.15% of Reading CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading
Temperature	Ambient	CMX0 Ambient CMX1 45°C CMX2 100°C CMX3 160°C
Analog Communication	0-10 Vdc (<10k Ohm load)	0-10 Vdc 5k Ohm load
Digital Communication	—	DeviceNet™ RS485
Size	Compact	Large

Capacitance Manometers for Critical Process Vacuum Measurement

KEY APPLICATIONS

PRODUCTS

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